JPS57157577A - Manufacture of thin film photovoltaic element - Google Patents
Manufacture of thin film photovoltaic elementInfo
- Publication number
- JPS57157577A JPS57157577A JP56042866A JP4286681A JPS57157577A JP S57157577 A JPS57157577 A JP S57157577A JP 56042866 A JP56042866 A JP 56042866A JP 4286681 A JP4286681 A JP 4286681A JP S57157577 A JPS57157577 A JP S57157577A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- forming
- time
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 5
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 2
- 230000031700 light absorption Effects 0.000 abstract 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56042866A JPS57157577A (en) | 1981-03-23 | 1981-03-23 | Manufacture of thin film photovoltaic element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56042866A JPS57157577A (en) | 1981-03-23 | 1981-03-23 | Manufacture of thin film photovoltaic element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57157577A true JPS57157577A (en) | 1982-09-29 |
JPS6312397B2 JPS6312397B2 (ja) | 1988-03-18 |
Family
ID=12647949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56042866A Granted JPS57157577A (en) | 1981-03-23 | 1981-03-23 | Manufacture of thin film photovoltaic element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57157577A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61251020A (ja) * | 1985-04-26 | 1986-11-08 | Kanegafuchi Chem Ind Co Ltd | 半導体装置の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154726A (en) * | 1979-05-22 | 1980-12-02 | Shunpei Yamazaki | Manufacture of semiconductor device |
JPS57139972A (en) * | 1981-02-13 | 1982-08-30 | Rca Corp | Method of producing amorphous silicon solar battery |
-
1981
- 1981-03-23 JP JP56042866A patent/JPS57157577A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55154726A (en) * | 1979-05-22 | 1980-12-02 | Shunpei Yamazaki | Manufacture of semiconductor device |
JPS57139972A (en) * | 1981-02-13 | 1982-08-30 | Rca Corp | Method of producing amorphous silicon solar battery |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61251020A (ja) * | 1985-04-26 | 1986-11-08 | Kanegafuchi Chem Ind Co Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6312397B2 (ja) | 1988-03-18 |
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