JPS57155370A - Method and device for evaporation depositing material on substrate - Google Patents
Method and device for evaporation depositing material on substrateInfo
- Publication number
- JPS57155370A JPS57155370A JP57028015A JP2801582A JPS57155370A JP S57155370 A JPS57155370 A JP S57155370A JP 57028015 A JP57028015 A JP 57028015A JP 2801582 A JP2801582 A JP 2801582A JP S57155370 A JPS57155370 A JP S57155370A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- depositing material
- evaporation depositing
- evaporation
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/237,670 US4351855A (en) | 1981-02-24 | 1981-02-24 | Noncrucible method of and apparatus for the vapor deposition of material upon a substrate using voltaic arc in vacuum |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57155370A true JPS57155370A (en) | 1982-09-25 |
JPS625228B2 JPS625228B2 (ja) | 1987-02-03 |
Family
ID=22894686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57028015A Granted JPS57155370A (en) | 1981-02-24 | 1982-02-23 | Method and device for evaporation depositing material on substrate |
Country Status (6)
Country | Link |
---|---|
US (1) | US4351855A (ja) |
JP (1) | JPS57155370A (ja) |
CA (1) | CA1193494A (ja) |
DE (1) | DE3206622A1 (ja) |
FR (1) | FR2500486B1 (ja) |
GB (2) | GB2093484B (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4596719A (en) * | 1981-02-24 | 1986-06-24 | Wedtech Corp. | Multilayer coating method and apparatus |
US4609564C2 (en) * | 1981-02-24 | 2001-10-09 | Masco Vt Inc | Method of and apparatus for the coating of a substrate with material electrically transformed into a vapor phase |
US4537794A (en) * | 1981-02-24 | 1985-08-27 | Wedtech Corp. | Method of coating ceramics |
US4407712A (en) * | 1982-06-01 | 1983-10-04 | The United States Of America As Represented By The Secretary Of The Army | Hollow cathode discharge source of metal vapor |
US4511593A (en) * | 1983-01-17 | 1985-04-16 | Multi-Arc Vacuum Systems Inc. | Vapor deposition apparatus and method |
DE3413891A1 (de) * | 1984-04-12 | 1985-10-17 | Horst Dipl.-Phys. Dr. 4270 Dorsten Ehrich | Verfahren und vorrichtung zum verdampfen von material in vakuum |
IL74360A (en) * | 1984-05-25 | 1989-01-31 | Wedtech Corp | Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase |
US4620913A (en) * | 1985-11-15 | 1986-11-04 | Multi-Arc Vacuum Systems, Inc. | Electric arc vapor deposition method and apparatus |
FR2612204A1 (fr) * | 1987-03-12 | 1988-09-16 | Vac Tec Syst | Procede et appareil pour le depot par un plasma d'arc electrique sous vide de revetements decoratifs et de revetements resistant a l'usure |
DE4122755A1 (de) * | 1991-07-10 | 1993-01-21 | Erno Raumfahrttechnik Gmbh | Triebwerk fuer raumflugkoerper |
DE4342574C1 (de) * | 1993-12-14 | 1995-04-13 | Hilmar Weinert | Bandbedampfungsanlage |
DE4422697C1 (de) * | 1994-06-29 | 1996-01-25 | Zsw | Verdampferquelle für eine Aufdampfanlage und ihre Verwendung |
US6096391A (en) * | 1998-10-16 | 2000-08-01 | Wilson Greatbatch Ltd. | Method for improving electrical conductivity of metals, metal alloys and metal oxides |
US6245435B1 (en) | 1999-03-01 | 2001-06-12 | Moen Incorporated | Decorative corrosion and abrasion resistant coating |
US7026057B2 (en) | 2002-01-23 | 2006-04-11 | Moen Incorporated | Corrosion and abrasion resistant decorative coating |
US7458991B2 (en) * | 2002-02-08 | 2008-12-02 | Howmedica Osteonics Corp. | Porous metallic scaffold for tissue ingrowth |
JP2008019477A (ja) * | 2006-07-13 | 2008-01-31 | Canon Inc | 真空蒸着装置 |
WO2011065998A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
DE102009019146B4 (de) * | 2009-04-29 | 2014-07-24 | THEVA DüNNSCHICHTTECHNIK GMBH | Verfahren und Vorrichtung zur Hochratenbeschichtung durch Hochdruckverdampfen |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5554563A (en) * | 1978-07-08 | 1980-04-21 | Kieferle Wolfgang | Method and apparatus for depositing metal or alloy layer on electrically conductive material to be processed |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB191418970A (en) * | 1913-08-23 | Schlueter Hermann | Process for Producing Metallic Coatings. | |
US1221104A (en) * | 1913-10-07 | 1917-04-03 | Georg Stolle | Process for making coatings of fusible substances. |
DE767858C (de) * | 1936-06-09 | 1954-03-29 | Rudolf Maier Dr | Verfahren, um Metalle, Metallegierungen und schwer in den Dampfzustand zu ueberfuehrende Stoffe ueber die Dampfform in technisch verwertbare Feststoffe, z. B. Metalloxyde, ueberzufuehren |
GB481842A (en) * | 1936-06-17 | 1938-03-18 | Bernhard Berghaus | Improvements in and relating to the coating of articles by vaporisation of the coating materials |
FR979772A (fr) * | 1948-01-30 | 1951-05-02 | Procédé et dispositif pour l'application de précipités métalliques sur des corps quelconques | |
US3036549A (en) * | 1957-05-08 | 1962-05-29 | Sumitomo Electric Industries | Apparatus for vacuum evaporation of metals |
GB889018A (en) * | 1957-05-24 | 1962-02-07 | Ass Elect Ind | Improvements relating to the stabilisation of low pressure d.c. arc discharges |
US3010009A (en) * | 1958-09-29 | 1961-11-21 | Plasmadyne Corp | Method and apparatus for uniting materials in a controlled medium |
FR1400961A (fr) * | 1964-07-15 | 1965-05-28 | Huettenwerk Oberhausen Ag | Procédé et dispositif de détermination spectroscopique ou spectrographique de la composition d'échantillons métalliques représentatifs prélevés de produits finis |
US3491015A (en) * | 1967-04-04 | 1970-01-20 | Automatic Fire Control Inc | Method of depositing elemental material from a low pressure electrical discharge |
DE1648968A1 (de) * | 1967-10-18 | 1971-10-21 | Lochte Holtgreven Walter Prof | Verfahren zur qualitativen und quantitativen Spektralanalyse mittels Entladungen an elektrisch verdampften Fluessigkeitsfaeden |
GB1257015A (ja) * | 1967-11-03 | 1971-12-15 | ||
DE1646004A1 (de) * | 1967-11-25 | 1971-07-01 | Lochte Holtgreven Walter Prof | Verfahren zur Behandlung von Oberflaechen mittels elektrisch explodierter Draehte oder Fluessigkeitsstrahlen |
US3793179A (en) * | 1971-07-19 | 1974-02-19 | L Sablev | Apparatus for metal evaporation coating |
US3925177A (en) * | 1973-01-30 | 1975-12-09 | Boeing Co | Method and apparatus for heating solid and liquid particulate material to vaporize or disassociate the material |
US3889632A (en) * | 1974-05-31 | 1975-06-17 | Ibm | Variable incidence drive for deposition tooling |
CH619344B (de) * | 1977-12-23 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
CH640886A5 (de) * | 1979-08-02 | 1984-01-31 | Balzers Hochvakuum | Verfahren zum aufbringen harter verschleissfester ueberzuege auf unterlagen. |
CH624817B (de) * | 1979-09-04 | Balzers Hochvakuum | Verfahren zur herstellung goldfarbener ueberzuege. | |
JPS6011103B2 (ja) * | 1981-02-23 | 1985-03-23 | レオニド パフロヴイツチ サブレフ | 電弧金属蒸発装置用の消耗性陰極 |
-
1981
- 1981-02-24 US US06/237,670 patent/US4351855A/en not_active Expired - Lifetime
-
1982
- 1982-02-17 CA CA000396498A patent/CA1193494A/en not_active Expired
- 1982-02-19 GB GB8204920A patent/GB2093484B/en not_active Expired
- 1982-02-23 JP JP57028015A patent/JPS57155370A/ja active Granted
- 1982-02-23 FR FR8203306A patent/FR2500486B1/fr not_active Expired
- 1982-02-24 DE DE19823206622 patent/DE3206622A1/de active Granted
-
1984
- 1984-02-09 GB GB08403456A patent/GB2156384B/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5554563A (en) * | 1978-07-08 | 1980-04-21 | Kieferle Wolfgang | Method and apparatus for depositing metal or alloy layer on electrically conductive material to be processed |
Also Published As
Publication number | Publication date |
---|---|
FR2500486B1 (fr) | 1985-06-28 |
DE3206622A1 (de) | 1982-10-07 |
GB8403456D0 (en) | 1984-03-14 |
GB2156384A (en) | 1985-10-09 |
US4351855A (en) | 1982-09-28 |
GB2093484B (en) | 1985-10-30 |
DE3206622C2 (ja) | 1991-03-14 |
FR2500486A1 (fr) | 1982-08-27 |
GB2156384B (en) | 1986-11-19 |
JPS625228B2 (ja) | 1987-02-03 |
CA1193494A (en) | 1985-09-17 |
GB2093484A (en) | 1982-09-02 |
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