JPS57152150A - Cooler for semiconductor and manufacture thereof - Google Patents
Cooler for semiconductor and manufacture thereofInfo
- Publication number
- JPS57152150A JPS57152150A JP56037118A JP3711881A JPS57152150A JP S57152150 A JPS57152150 A JP S57152150A JP 56037118 A JP56037118 A JP 56037118A JP 3711881 A JP3711881 A JP 3711881A JP S57152150 A JPS57152150 A JP S57152150A
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- soldered
- groove parts
- plural
- cooler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0266—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with separate evaporating and condensing chambers connected by at least one conduit; Loop-type heat pipes; with multiple or common evaporating or condensing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
PURPOSE:To enhance performance of the interchange of heat at the path of refrigerant of a cooler for semiconductor by a method wherein a pair of metal comb-teeth type members are soldered facing mutually, plural pairs of groove parts constitute the path for refrigerant, and metal powder bodies are soldered to the surface of the groove parts to form the porous face. CONSTITUTION:The cooler is consisting of an evaporating part 1 at the lower part, a condensing part 2 at the upper part, and a vapor and liquid separating chamber 3 at the middle part. The semiconductor elements 4 are equipped on both end faces of the evaporating part 1, and the plural pathes 5 for refrigerant are formed inside in the vertical direction. A pair of Al members 7 having the comb-teeth type section are soldered facing mutually interposing placing sheets 6 between them, and sealing-up plate 9 is fixed to the lower end part. The plural pathes 5 for refrigerant having the elliptical section are formed by the plural pairs of the groove parts 10 of the members 7. The surface of the groove parts have the saw-teeth type uneven face, and is soldered with the Al powder bodies 11 to form the porous face. Accordingly thermal conductivity is enhanced, and performance of the interchange of heat is enhanced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56037118A JPS57152150A (en) | 1981-03-13 | 1981-03-13 | Cooler for semiconductor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56037118A JPS57152150A (en) | 1981-03-13 | 1981-03-13 | Cooler for semiconductor and manufacture thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57152150A true JPS57152150A (en) | 1982-09-20 |
JPS6351387B2 JPS6351387B2 (en) | 1988-10-13 |
Family
ID=12488680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56037118A Granted JPS57152150A (en) | 1981-03-13 | 1981-03-13 | Cooler for semiconductor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57152150A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5713413A (en) * | 1994-12-28 | 1998-02-03 | Nippondenso Co., Ltd. | Cooling apparatus using boiling and condensing refrigerant |
EP0852399A1 (en) * | 1995-09-08 | 1998-07-08 | Sumitomo Precision Products Company Limited | Semiconductor element cooling apparatus |
US5832989A (en) * | 1996-03-14 | 1998-11-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
US6073683A (en) * | 1995-07-05 | 2000-06-13 | Nippondenso Co., Ltd. | Cooling apparatus using boiling and condensing refrigerant and method for manufacturing the same |
US6279649B1 (en) * | 1998-04-27 | 2001-08-28 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
US6357517B1 (en) * | 1994-07-04 | 2002-03-19 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
US6575230B1 (en) * | 1996-01-29 | 2003-06-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
-
1981
- 1981-03-13 JP JP56037118A patent/JPS57152150A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6357517B1 (en) * | 1994-07-04 | 2002-03-19 | Denso Corporation | Cooling apparatus boiling and condensing refrigerant |
US5713413A (en) * | 1994-12-28 | 1998-02-03 | Nippondenso Co., Ltd. | Cooling apparatus using boiling and condensing refrigerant |
US6073683A (en) * | 1995-07-05 | 2000-06-13 | Nippondenso Co., Ltd. | Cooling apparatus using boiling and condensing refrigerant and method for manufacturing the same |
EP0852399A1 (en) * | 1995-09-08 | 1998-07-08 | Sumitomo Precision Products Company Limited | Semiconductor element cooling apparatus |
US6575230B1 (en) * | 1996-01-29 | 2003-06-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
US5832989A (en) * | 1996-03-14 | 1998-11-10 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
US6279649B1 (en) * | 1998-04-27 | 2001-08-28 | Denso Corporation | Cooling apparatus using boiling and condensing refrigerant |
Also Published As
Publication number | Publication date |
---|---|
JPS6351387B2 (en) | 1988-10-13 |
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