JPS57151159A - Objective lens of electron beam device - Google Patents

Objective lens of electron beam device

Info

Publication number
JPS57151159A
JPS57151159A JP3526581A JP3526581A JPS57151159A JP S57151159 A JPS57151159 A JP S57151159A JP 3526581 A JP3526581 A JP 3526581A JP 3526581 A JP3526581 A JP 3526581A JP S57151159 A JPS57151159 A JP S57151159A
Authority
JP
Japan
Prior art keywords
magnetic pole
cylinders
inner cylinders
yoke
gears
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3526581A
Other languages
English (en)
Other versions
JPS6338824B2 (ja
Inventor
Takashi Yanaka
Kazuo Osawa
Masaru Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Original Assignee
INTERNATL PRECISION Inc
KOKUSAI SEIKO
KOKUSAI SEIKOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc, KOKUSAI SEIKO, KOKUSAI SEIKOU KK filed Critical INTERNATL PRECISION Inc
Priority to JP3526581A priority Critical patent/JPS57151159A/ja
Publication of JPS57151159A publication Critical patent/JPS57151159A/ja
Publication of JPS6338824B2 publication Critical patent/JPS6338824B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP3526581A 1981-03-13 1981-03-13 Objective lens of electron beam device Granted JPS57151159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3526581A JPS57151159A (en) 1981-03-13 1981-03-13 Objective lens of electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3526581A JPS57151159A (en) 1981-03-13 1981-03-13 Objective lens of electron beam device

Publications (2)

Publication Number Publication Date
JPS57151159A true JPS57151159A (en) 1982-09-18
JPS6338824B2 JPS6338824B2 (ja) 1988-08-02

Family

ID=12436965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3526581A Granted JPS57151159A (en) 1981-03-13 1981-03-13 Objective lens of electron beam device

Country Status (1)

Country Link
JP (1) JPS57151159A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826439A (ja) * 1981-08-11 1983-02-16 Internatl Precision Inc 電子線装置の対物レンズ
JPS5841571U (ja) * 1981-09-11 1983-03-18 株式会社明石製作所 電子線装置の対物レンズ
JP2001312986A (ja) * 2000-04-26 2001-11-09 Hitachi Ltd 電子銃
JP2018049728A (ja) * 2016-09-21 2018-03-29 日本電子株式会社 対物レンズおよび透過電子顕微鏡
CN109585245A (zh) * 2015-01-30 2019-04-05 松定精度株式会社 荷电粒子线装置及扫描电子显微镜

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826439A (ja) * 1981-08-11 1983-02-16 Internatl Precision Inc 電子線装置の対物レンズ
JPS5841571U (ja) * 1981-09-11 1983-03-18 株式会社明石製作所 電子線装置の対物レンズ
JP2001312986A (ja) * 2000-04-26 2001-11-09 Hitachi Ltd 電子銃
CN109585245A (zh) * 2015-01-30 2019-04-05 松定精度株式会社 荷电粒子线装置及扫描电子显微镜
CN109585245B (zh) * 2015-01-30 2021-03-23 松定精度株式会社 荷电粒子线装置及扫描电子显微镜
JP2018049728A (ja) * 2016-09-21 2018-03-29 日本電子株式会社 対物レンズおよび透過電子顕微鏡
EP3309814A3 (en) * 2016-09-21 2018-08-01 Jeol Ltd. Objective lens and transmission electron microscope
US10224173B2 (en) * 2016-09-21 2019-03-05 Jeol Ltd. Objective lens and transmission electron microscope

Also Published As

Publication number Publication date
JPS6338824B2 (ja) 1988-08-02

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