JPS5714815A - Optical microscopic device - Google Patents

Optical microscopic device

Info

Publication number
JPS5714815A
JPS5714815A JP8855580A JP8855580A JPS5714815A JP S5714815 A JPS5714815 A JP S5714815A JP 8855580 A JP8855580 A JP 8855580A JP 8855580 A JP8855580 A JP 8855580A JP S5714815 A JPS5714815 A JP S5714815A
Authority
JP
Japan
Prior art keywords
prism
image
moving
plane
pechen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8855580A
Other languages
Japanese (ja)
Inventor
Yasuki Kiyohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP8855580A priority Critical patent/JPS5714815A/en
Publication of JPS5714815A publication Critical patent/JPS5714815A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To prevent the degradation in the accuracy of microscopic measurement by relatively moving one or two of an objective lens, Pechen's prism and an image receiver thereby moving the image of an object to be inspected. CONSTITUTION:A transparent object 1 to be inspected is lighted with a light source 2 by way of a condenser lens 3, and a Pechen's prism 5 which is an assembling type prism installed behind an objective lens 4 and permitting accurate fine adjusting movement to the plane XY perpendicular to the optical axis is provided, whereby the imaging plane 6' of an image receiver 6 is obtained. At the time of moving the prism 5 with respect to the optical axis, an image 7'' is formed on the plane 6' of the device 6 by the performance of the prism 5 in the other examining section 1'' of the object 2, thus the formed image is moved with respect to the imaging plane without moving the object 1.
JP8855580A 1980-07-01 1980-07-01 Optical microscopic device Pending JPS5714815A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8855580A JPS5714815A (en) 1980-07-01 1980-07-01 Optical microscopic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8855580A JPS5714815A (en) 1980-07-01 1980-07-01 Optical microscopic device

Publications (1)

Publication Number Publication Date
JPS5714815A true JPS5714815A (en) 1982-01-26

Family

ID=13946107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8855580A Pending JPS5714815A (en) 1980-07-01 1980-07-01 Optical microscopic device

Country Status (1)

Country Link
JP (1) JPS5714815A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135722A (en) * 1984-07-30 1986-02-20 有限会社 コンペツクス Artificial culture log and mushroom culture method
EP0188234A2 (en) * 1985-01-14 1986-07-23 Edward H. Phillips Improved step-and-repeat alignment and exposure system
WO2023072880A1 (en) * 2021-10-29 2023-05-04 Asml Netherlands B.V. Inspection apparatus, polarization-maintaining rotatable beam displacer, and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135722A (en) * 1984-07-30 1986-02-20 有限会社 コンペツクス Artificial culture log and mushroom culture method
JPH0253004B2 (en) * 1984-07-30 1990-11-15 Konpetsukusu Jugen
EP0188234A2 (en) * 1985-01-14 1986-07-23 Edward H. Phillips Improved step-and-repeat alignment and exposure system
WO2023072880A1 (en) * 2021-10-29 2023-05-04 Asml Netherlands B.V. Inspection apparatus, polarization-maintaining rotatable beam displacer, and method

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