JPS57147857A - Sample observation through scanning electron microscope - Google Patents
Sample observation through scanning electron microscopeInfo
- Publication number
- JPS57147857A JPS57147857A JP3133281A JP3133281A JPS57147857A JP S57147857 A JPS57147857 A JP S57147857A JP 3133281 A JP3133281 A JP 3133281A JP 3133281 A JP3133281 A JP 3133281A JP S57147857 A JPS57147857 A JP S57147857A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- room
- charging
- observation
- positively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3133281A JPS57147857A (en) | 1981-03-06 | 1981-03-06 | Sample observation through scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3133281A JPS57147857A (en) | 1981-03-06 | 1981-03-06 | Sample observation through scanning electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57147857A true JPS57147857A (en) | 1982-09-11 |
JPS6148210B2 JPS6148210B2 (ja) | 1986-10-23 |
Family
ID=12328297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3133281A Granted JPS57147857A (en) | 1981-03-06 | 1981-03-06 | Sample observation through scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57147857A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002131887A (ja) * | 2000-10-20 | 2002-05-09 | Horon:Kk | マスク検査装置 |
WO2002075772A3 (en) * | 2001-03-19 | 2003-03-06 | Kla Tencor Corp | Simultaneous flooding and inspection for charge control in an electron beam inspection machine |
EP1296352A1 (en) * | 2000-06-27 | 2003-03-26 | Ebara Corporation | Charged particle beam inspection apparatus and method for fabricating device using that inspection apparatus |
WO2007083756A1 (ja) * | 2006-01-20 | 2007-07-26 | Juridical Foundation Osaka Industrial Promotion Organization | 電子顕微鏡用チャージアップ防止液状媒体、及びそれを用いた試料観察方法 |
US7417444B2 (en) | 1996-03-05 | 2008-08-26 | Hitachi, Ltd. | Method and apparatus for inspecting integrated circuit pattern |
WO2013035866A1 (ja) * | 2011-09-09 | 2013-03-14 | 独立行政法人科学技術振興機構 | 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127981A (ja) * | 1974-09-02 | 1976-03-09 | Mitsui Shipbuilding Eng | Jikubarikikei |
-
1981
- 1981-03-06 JP JP3133281A patent/JPS57147857A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5127981A (ja) * | 1974-09-02 | 1976-03-09 | Mitsui Shipbuilding Eng | Jikubarikikei |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7417444B2 (en) | 1996-03-05 | 2008-08-26 | Hitachi, Ltd. | Method and apparatus for inspecting integrated circuit pattern |
US7952074B2 (en) | 1996-03-05 | 2011-05-31 | Hitachi, Ltd. | Method and apparatus for inspecting integrated circuit pattern |
US8368031B2 (en) | 2000-06-27 | 2013-02-05 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
US8053726B2 (en) | 2000-06-27 | 2011-11-08 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
EP1296352A4 (en) * | 2000-06-27 | 2007-04-18 | Ebara Corp | INVESTIGATION DEVICE FOR LOADED PARTICLE RAYS AND METHOD FOR PRODUCING A COMPONENT ELEVATED WITH THIS INSPECTION DEVICE |
US7241993B2 (en) | 2000-06-27 | 2007-07-10 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
US9368314B2 (en) | 2000-06-27 | 2016-06-14 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
US7411191B2 (en) | 2000-06-27 | 2008-08-12 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
EP1296352A1 (en) * | 2000-06-27 | 2003-03-26 | Ebara Corporation | Charged particle beam inspection apparatus and method for fabricating device using that inspection apparatus |
US8803103B2 (en) | 2000-06-27 | 2014-08-12 | Ebara Corporation | Inspection system by charged particle beam and method of manufacturing devices using the system |
JP2002131887A (ja) * | 2000-10-20 | 2002-05-09 | Horon:Kk | マスク検査装置 |
JP4629207B2 (ja) * | 2000-10-20 | 2011-02-09 | 株式会社ホロン | マスク検査装置 |
WO2002075772A3 (en) * | 2001-03-19 | 2003-03-06 | Kla Tencor Corp | Simultaneous flooding and inspection for charge control in an electron beam inspection machine |
US6627884B2 (en) | 2001-03-19 | 2003-09-30 | Kla-Tencor Technologies Corporation | Simultaneous flooding and inspection for charge control in an electron beam inspection machine |
US7880144B2 (en) | 2006-01-20 | 2011-02-01 | Juridical Foundation Osaka Industrial Promotion Organization c/o Mydome Osaka | Liquid medium for preventing charge-up in electron microscope and method of observing sample using the same |
JP4581100B2 (ja) * | 2006-01-20 | 2010-11-17 | 財団法人大阪産業振興機構 | 電子顕微鏡用の標体の作製方法およびそれを用いた試料観察方法、ならびに試料観察装置 |
JPWO2007083756A1 (ja) * | 2006-01-20 | 2009-06-11 | 財団法人大阪産業振興機構 | 電子顕微鏡用チャージアップ防止液状媒体、及びそれを用いた試料観察方法 |
WO2007083756A1 (ja) * | 2006-01-20 | 2007-07-26 | Juridical Foundation Osaka Industrial Promotion Organization | 電子顕微鏡用チャージアップ防止液状媒体、及びそれを用いた試料観察方法 |
WO2013035866A1 (ja) * | 2011-09-09 | 2013-03-14 | 独立行政法人科学技術振興機構 | 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡 |
JPWO2013035866A1 (ja) * | 2011-09-09 | 2015-03-23 | 独立行政法人科学技術振興機構 | 生物試料をそのままの姿で観察するための電子顕微鏡による観察方法とそれに用いられる真空下での蒸発抑制用組成物、走査型電子顕微鏡および透過型電子顕微鏡 |
Also Published As
Publication number | Publication date |
---|---|
JPS6148210B2 (ja) | 1986-10-23 |
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