JPS57146123A - Infrared detector - Google Patents

Infrared detector

Info

Publication number
JPS57146123A
JPS57146123A JP3165981A JP3165981A JPS57146123A JP S57146123 A JPS57146123 A JP S57146123A JP 3165981 A JP3165981 A JP 3165981A JP 3165981 A JP3165981 A JP 3165981A JP S57146123 A JPS57146123 A JP S57146123A
Authority
JP
Japan
Prior art keywords
film
resist layer
photo resist
picture
infrared
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3165981A
Other languages
Japanese (ja)
Inventor
Yoshihiro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3165981A priority Critical patent/JPS57146123A/en
Publication of JPS57146123A publication Critical patent/JPS57146123A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To improve a picture quality of an infrared picture, by a method wherein heat shielding substance in the same shape are formed between infrared detecting elements placed on a semiconductor. CONSTITUTION:A protection film 4 is formed on a licensor D wherein P type regions 2a, 2b,... are placed on a n type semicondcutor substrate, such as InSb, SdHgte. A photo resist layer 5 is applied thereon, and after it is dried, an Al film 6 is vacum-evaporated, and openings 7a, 7b,... are formed in the Al film 6 by a photo etching. The photosensitive part of the photo resist layer 5 is removed with the Al film, acting as a mask, by exposure and development. The photo resist layer 5, wherein the openings are formed, and an Al film 6 are formed on each of the elements 2a, 2b,... to remove the influence exercised by a back shadow radiation, and this enables to improve a picture quality of an infrared picture.
JP3165981A 1981-03-04 1981-03-04 Infrared detector Pending JPS57146123A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3165981A JPS57146123A (en) 1981-03-04 1981-03-04 Infrared detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3165981A JPS57146123A (en) 1981-03-04 1981-03-04 Infrared detector

Publications (1)

Publication Number Publication Date
JPS57146123A true JPS57146123A (en) 1982-09-09

Family

ID=12337268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3165981A Pending JPS57146123A (en) 1981-03-04 1981-03-04 Infrared detector

Country Status (1)

Country Link
JP (1) JPS57146123A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2577073A1 (en) * 1985-02-06 1986-08-08 Commissariat Energie Atomique MATRIX DEVICE FOR DETECTING LUMINOUS RADIATION WITH INDIVIDUAL COLD SCREENS INTEGRATED IN A SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
US4883967A (en) * 1987-05-26 1989-11-28 Matsushita Electric Industrial Co., Ltd. Radiation detector and method of manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2577073A1 (en) * 1985-02-06 1986-08-08 Commissariat Energie Atomique MATRIX DEVICE FOR DETECTING LUMINOUS RADIATION WITH INDIVIDUAL COLD SCREENS INTEGRATED IN A SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
US4883967A (en) * 1987-05-26 1989-11-28 Matsushita Electric Industrial Co., Ltd. Radiation detector and method of manufacturing the same

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