JPS57144454A - Production of oxygen concentration detecting element - Google Patents
Production of oxygen concentration detecting elementInfo
- Publication number
- JPS57144454A JPS57144454A JP56029347A JP2934781A JPS57144454A JP S57144454 A JPS57144454 A JP S57144454A JP 56029347 A JP56029347 A JP 56029347A JP 2934781 A JP2934781 A JP 2934781A JP S57144454 A JPS57144454 A JP S57144454A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- oxygen concn
- detecting element
- manufactured
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052760 oxygen Inorganic materials 0.000 title abstract 6
- 239000001301 oxygen Substances 0.000 title abstract 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 abstract 8
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000005240 physical vapour deposition Methods 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000007784 solid electrolyte Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56029347A JPS57144454A (en) | 1981-03-03 | 1981-03-03 | Production of oxygen concentration detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56029347A JPS57144454A (en) | 1981-03-03 | 1981-03-03 | Production of oxygen concentration detecting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57144454A true JPS57144454A (en) | 1982-09-07 |
JPH0147739B2 JPH0147739B2 (enrdf_load_stackoverflow) | 1989-10-16 |
Family
ID=12273687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56029347A Granted JPS57144454A (en) | 1981-03-03 | 1981-03-03 | Production of oxygen concentration detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57144454A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59166854A (ja) * | 1983-03-14 | 1984-09-20 | Toyota Central Res & Dev Lab Inc | 限界電流式酸素センサ |
JPS6118854A (ja) * | 1984-07-06 | 1986-01-27 | Nippon Denso Co Ltd | 酸素濃度検出素子 |
JPH0755765A (ja) * | 1993-08-12 | 1995-03-03 | Toyota Central Res & Dev Lab Inc | 薄膜積層空燃比センサ |
JP2008275456A (ja) * | 2007-04-27 | 2008-11-13 | Atago:Kk | 濃度測定装置 |
-
1981
- 1981-03-03 JP JP56029347A patent/JPS57144454A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59166854A (ja) * | 1983-03-14 | 1984-09-20 | Toyota Central Res & Dev Lab Inc | 限界電流式酸素センサ |
JPS6118854A (ja) * | 1984-07-06 | 1986-01-27 | Nippon Denso Co Ltd | 酸素濃度検出素子 |
JPH0755765A (ja) * | 1993-08-12 | 1995-03-03 | Toyota Central Res & Dev Lab Inc | 薄膜積層空燃比センサ |
JP2008275456A (ja) * | 2007-04-27 | 2008-11-13 | Atago:Kk | 濃度測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0147739B2 (enrdf_load_stackoverflow) | 1989-10-16 |
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