JPS5690252A - Manufacture of lamination-type membrane-structured oxygen sensor - Google Patents

Abstract

PURPOSE: To prevent line cut in a contact part between an electrode layer and an electrolytic layer and improve durability and yield by deviating the position of a solid electrolyte each time when a solid electrolyte is formed by laminating a solid electrolyte in multiple layers on an electrode of reference side.

CONSTITUTION: A reference-side electrode 3, a solid electrolytic layer 4, a measurement-side electrode 5 and a protective layer 6 are laminated in that order on a substrate 1 laminated with a heater layer 2 on a substrate material 1a and a substrate material 1b. When an oxygen sensor 10 is manufactured in this manner, a solid electrolytic layer 14 of a prearranged thickness is formed by laminating solid electrolyte pastes 14a, 14b, 14c such as Y₂O₃-ZrO₂, etc. on a reference-side electrode 13 (platinum paste, etc.). In this case, a layer 14b is laminated by deviating by a width L slightly wider than a part l where the paste 14a has oozed out of a contact part B with a layer 13 and further a layer 14c is laminated by deviating by a width L' wider than the width l'. As a result, the electrolytic layer 13 is resolved by a solvent of the pastes 14b, 14c, so that a sensor after sintering is less susceptible of line cut or line cut in the electrode layer 13 is prevented from occurring at the contact part B.

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