JPS57139920A - Diffusing method for impurity for semiconductor - Google Patents
Diffusing method for impurity for semiconductorInfo
- Publication number
- JPS57139920A JPS57139920A JP2636881A JP2636881A JPS57139920A JP S57139920 A JPS57139920 A JP S57139920A JP 2636881 A JP2636881 A JP 2636881A JP 2636881 A JP2636881 A JP 2636881A JP S57139920 A JPS57139920 A JP S57139920A
- Authority
- JP
- Japan
- Prior art keywords
- sealed
- impurity
- tubes
- tube
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2636881A JPS57139920A (en) | 1981-02-25 | 1981-02-25 | Diffusing method for impurity for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2636881A JPS57139920A (en) | 1981-02-25 | 1981-02-25 | Diffusing method for impurity for semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57139920A true JPS57139920A (en) | 1982-08-30 |
Family
ID=12191552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2636881A Pending JPS57139920A (en) | 1981-02-25 | 1981-02-25 | Diffusing method for impurity for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57139920A (ja) |
-
1981
- 1981-02-25 JP JP2636881A patent/JPS57139920A/ja active Pending
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