JPS57138183A - Semiconductor pressure and differential pressure detector - Google Patents
Semiconductor pressure and differential pressure detectorInfo
- Publication number
- JPS57138183A JPS57138183A JP56023069A JP2306981A JPS57138183A JP S57138183 A JPS57138183 A JP S57138183A JP 56023069 A JP56023069 A JP 56023069A JP 2306981 A JP2306981 A JP 2306981A JP S57138183 A JPS57138183 A JP S57138183A
- Authority
- JP
- Japan
- Prior art keywords
- thick part
- gauge
- resistor
- film
- central
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56023069A JPS57138183A (en) | 1981-02-20 | 1981-02-20 | Semiconductor pressure and differential pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56023069A JPS57138183A (en) | 1981-02-20 | 1981-02-20 | Semiconductor pressure and differential pressure detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57138183A true JPS57138183A (en) | 1982-08-26 |
| JPS6222538B2 JPS6222538B2 (enrdf_load_stackoverflow) | 1987-05-19 |
Family
ID=12100108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56023069A Granted JPS57138183A (en) | 1981-02-20 | 1981-02-20 | Semiconductor pressure and differential pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57138183A (enrdf_load_stackoverflow) |
-
1981
- 1981-02-20 JP JP56023069A patent/JPS57138183A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6222538B2 (enrdf_load_stackoverflow) | 1987-05-19 |
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