JPS57138173A - Manufacture of solid image pick up element - Google Patents

Manufacture of solid image pick up element

Info

Publication number
JPS57138173A
JPS57138173A JP56024120A JP2412081A JPS57138173A JP S57138173 A JPS57138173 A JP S57138173A JP 56024120 A JP56024120 A JP 56024120A JP 2412081 A JP2412081 A JP 2412081A JP S57138173 A JPS57138173 A JP S57138173A
Authority
JP
Japan
Prior art keywords
film
light
substrate
mask
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56024120A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622463B2 (enrdf_load_stackoverflow
Inventor
Kazufumi Ogawa
Takao Chikamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56024120A priority Critical patent/JPS57138173A/ja
Publication of JPS57138173A publication Critical patent/JPS57138173A/ja
Publication of JPS622463B2 publication Critical patent/JPS622463B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/153—Two-dimensional or three-dimensional array CCD image sensors

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP56024120A 1981-02-19 1981-02-19 Manufacture of solid image pick up element Granted JPS57138173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56024120A JPS57138173A (en) 1981-02-19 1981-02-19 Manufacture of solid image pick up element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56024120A JPS57138173A (en) 1981-02-19 1981-02-19 Manufacture of solid image pick up element

Publications (2)

Publication Number Publication Date
JPS57138173A true JPS57138173A (en) 1982-08-26
JPS622463B2 JPS622463B2 (enrdf_load_stackoverflow) 1987-01-20

Family

ID=12129445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56024120A Granted JPS57138173A (en) 1981-02-19 1981-02-19 Manufacture of solid image pick up element

Country Status (1)

Country Link
JP (1) JPS57138173A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0261762U (enrdf_load_stackoverflow) * 1988-10-31 1990-05-08

Also Published As

Publication number Publication date
JPS622463B2 (enrdf_load_stackoverflow) 1987-01-20

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