JPS57133645A - Semiconductor integrated circuit device and manufacture thereof - Google Patents

Semiconductor integrated circuit device and manufacture thereof

Info

Publication number
JPS57133645A
JPS57133645A JP56019462A JP1946281A JPS57133645A JP S57133645 A JPS57133645 A JP S57133645A JP 56019462 A JP56019462 A JP 56019462A JP 1946281 A JP1946281 A JP 1946281A JP S57133645 A JPS57133645 A JP S57133645A
Authority
JP
Japan
Prior art keywords
film
layer
groove
coated
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56019462A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217937B2 (OSRAM
Inventor
Toshihiko Fukuyama
Yoshinobu Monma
Ryoji Abe
Akira Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56019462A priority Critical patent/JPS57133645A/ja
Publication of JPS57133645A publication Critical patent/JPS57133645A/ja
Publication of JPH0217937B2 publication Critical patent/JPH0217937B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/763—Polycrystalline semiconductor regions

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
JP56019462A 1981-02-12 1981-02-12 Semiconductor integrated circuit device and manufacture thereof Granted JPS57133645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56019462A JPS57133645A (en) 1981-02-12 1981-02-12 Semiconductor integrated circuit device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56019462A JPS57133645A (en) 1981-02-12 1981-02-12 Semiconductor integrated circuit device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57133645A true JPS57133645A (en) 1982-08-18
JPH0217937B2 JPH0217937B2 (OSRAM) 1990-04-24

Family

ID=11999986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56019462A Granted JPS57133645A (en) 1981-02-12 1981-02-12 Semiconductor integrated circuit device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57133645A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156552A (ja) * 1988-12-08 1990-06-15 Nec Corp 半導体装置およびその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4869485A (OSRAM) * 1971-12-22 1973-09-20
JPS5379473A (en) * 1976-12-24 1978-07-13 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4869485A (OSRAM) * 1971-12-22 1973-09-20
JPS5379473A (en) * 1976-12-24 1978-07-13 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02156552A (ja) * 1988-12-08 1990-06-15 Nec Corp 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPH0217937B2 (OSRAM) 1990-04-24

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