JPS5712546A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS5712546A
JPS5712546A JP8583780A JP8583780A JPS5712546A JP S5712546 A JPS5712546 A JP S5712546A JP 8583780 A JP8583780 A JP 8583780A JP 8583780 A JP8583780 A JP 8583780A JP S5712546 A JPS5712546 A JP S5712546A
Authority
JP
Japan
Prior art keywords
layer
layers
type
substrate
bipolar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8583780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639667B2 (enrdf_load_stackoverflow
Inventor
Yoshinobu Monma
Tadashi Kirisako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8583780A priority Critical patent/JPS5712546A/ja
Publication of JPS5712546A publication Critical patent/JPS5712546A/ja
Publication of JPS639667B2 publication Critical patent/JPS639667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67—Complementary BJTs
    • H10D84/673—Vertical complementary BJTs

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP8583780A 1980-06-26 1980-06-26 Semiconductor device and its manufacture Granted JPS5712546A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8583780A JPS5712546A (en) 1980-06-26 1980-06-26 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8583780A JPS5712546A (en) 1980-06-26 1980-06-26 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5712546A true JPS5712546A (en) 1982-01-22
JPS639667B2 JPS639667B2 (enrdf_load_stackoverflow) 1988-03-01

Family

ID=13869967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8583780A Granted JPS5712546A (en) 1980-06-26 1980-06-26 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5712546A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254570A (ja) * 1988-08-18 1990-02-23 Fuji Electric Co Ltd 集積回路装置
EP0792514A4 (en) * 1994-11-04 1998-06-17 Analog Devices Inc INTEGRATED CIRCUIT WITH COMPLEMENTARY ISOLATED BIPOLAR TRANSISTORS AND MANUFACTURING METHOD

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254570A (ja) * 1988-08-18 1990-02-23 Fuji Electric Co Ltd 集積回路装置
EP0792514A4 (en) * 1994-11-04 1998-06-17 Analog Devices Inc INTEGRATED CIRCUIT WITH COMPLEMENTARY ISOLATED BIPOLAR TRANSISTORS AND MANUFACTURING METHOD

Also Published As

Publication number Publication date
JPS639667B2 (enrdf_load_stackoverflow) 1988-03-01

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