JPS57119253A - Gas sensor element - Google Patents

Gas sensor element

Info

Publication number
JPS57119253A
JPS57119253A JP56004853A JP485381A JPS57119253A JP S57119253 A JPS57119253 A JP S57119253A JP 56004853 A JP56004853 A JP 56004853A JP 485381 A JP485381 A JP 485381A JP S57119253 A JPS57119253 A JP S57119253A
Authority
JP
Japan
Prior art keywords
gas
zro2
layer
cao
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56004853A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0115015B2 (en, 2012
Inventor
Katsuhiro Teraishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP56004853A priority Critical patent/JPS57119253A/ja
Publication of JPS57119253A publication Critical patent/JPS57119253A/ja
Publication of JPH0115015B2 publication Critical patent/JPH0115015B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Hardware Design (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP56004853A 1981-01-16 1981-01-16 Gas sensor element Granted JPS57119253A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56004853A JPS57119253A (en) 1981-01-16 1981-01-16 Gas sensor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56004853A JPS57119253A (en) 1981-01-16 1981-01-16 Gas sensor element

Publications (2)

Publication Number Publication Date
JPS57119253A true JPS57119253A (en) 1982-07-24
JPH0115015B2 JPH0115015B2 (en, 2012) 1989-03-15

Family

ID=11595230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56004853A Granted JPS57119253A (en) 1981-01-16 1981-01-16 Gas sensor element

Country Status (1)

Country Link
JP (1) JPS57119253A (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119251A (en) * 1981-01-16 1982-07-24 Seiko Epson Corp Gas sensor element
JPS62237347A (ja) * 1986-04-08 1987-10-17 Tokuyama Soda Co Ltd 電界効果トランジスタ型ガスセンサ−

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57119251A (en) * 1981-01-16 1982-07-24 Seiko Epson Corp Gas sensor element
JPS62237347A (ja) * 1986-04-08 1987-10-17 Tokuyama Soda Co Ltd 電界効果トランジスタ型ガスセンサ−

Also Published As

Publication number Publication date
JPH0115015B2 (en, 2012) 1989-03-15

Similar Documents

Publication Publication Date Title
CA1078020A (en) Technique for protecting sensing electrodes in sulfiding environments
WO1998012550A1 (fr) Capteur de gaz
JP2890601B2 (ja) 半導体センサ
JPS58103654A (ja) 多機能ガスセンサ
US4356150A (en) Humidity sensor with electrical rejection of contaminants
JPS57119253A (en) Gas sensor element
JPS5734446A (en) Nultifunctional detecting element and multifunctional detector
JPS57119252A (en) Gas sensor element
JPH0797095B2 (ja) 一酸化炭素ガスセンサ
JPS6441852A (en) Hydrogen ion sensitive semiconductor sensor
Stoev et al. An integrated gas sensor on silicon substrate with sensitive SnOx layer
GB1526751A (en) Gas sensitive resistive elements
EP0480076A1 (en) Method and sensor for measuring oxygen partial pressure
Salzano et al. Ionic Range of ThO2‐15 w/o Y 2 O 3 at High Oxygen Activities
JPS577549A (en) Fet gas sensor
JPS63101740A (ja) 縦型電界効果トランジスタ型ガスセンサ
JPS568537A (en) Flammable gas detecting element
JPS57119251A (en) Gas sensor element
JPS6371648A (ja) ダイオ−ド型湿度センサ
JPS60120240A (ja) Ｉｓｆｅｔセンサ
JPH04233444A (ja) 酸素センサ
JPS5679245A (en) Ion sensor
JPS5744847A (en) Detecting element for inflammable gas
JPH0519944B2 (en, 2012)
JPH0434357A (ja) 湿度センサ