JPS5711897A - Method of pulling up single crystal and device therefor - Google Patents

Method of pulling up single crystal and device therefor

Info

Publication number
JPS5711897A
JPS5711897A JP8817480A JP8817480A JPS5711897A JP S5711897 A JPS5711897 A JP S5711897A JP 8817480 A JP8817480 A JP 8817480A JP 8817480 A JP8817480 A JP 8817480A JP S5711897 A JPS5711897 A JP S5711897A
Authority
JP
Japan
Prior art keywords
heater
crucible
heaters
single crystal
temperature distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8817480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6234717B2 (enExample
Inventor
Akihisa Kawasaki
Masao Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP8817480A priority Critical patent/JPS5711897A/ja
Publication of JPS5711897A publication Critical patent/JPS5711897A/ja
Publication of JPS6234717B2 publication Critical patent/JPS6234717B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Resistance Heating (AREA)
JP8817480A 1980-06-27 1980-06-27 Method of pulling up single crystal and device therefor Granted JPS5711897A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8817480A JPS5711897A (en) 1980-06-27 1980-06-27 Method of pulling up single crystal and device therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8817480A JPS5711897A (en) 1980-06-27 1980-06-27 Method of pulling up single crystal and device therefor

Publications (2)

Publication Number Publication Date
JPS5711897A true JPS5711897A (en) 1982-01-21
JPS6234717B2 JPS6234717B2 (enExample) 1987-07-28

Family

ID=13935539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8817480A Granted JPS5711897A (en) 1980-06-27 1980-06-27 Method of pulling up single crystal and device therefor

Country Status (1)

Country Link
JP (1) JPS5711897A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137399A (ja) * 1983-01-28 1984-08-07 Nippon Telegr & Teleph Corp <Ntt> 低転位密度単結晶の育成方法及びその装置
JPS60221391A (ja) * 1984-04-18 1985-11-06 Toshiba Corp 化合物半導体単結晶育成装置
JPS6144794A (ja) * 1984-08-08 1986-03-04 Hitachi Ltd 発熱体
US4645560A (en) * 1983-08-26 1987-02-24 Sumito Electric Industries, Ltd. Liquid encapsulation method for growing single semiconductor crystals
US4863554A (en) * 1983-08-23 1989-09-05 Sumitomo Electric Industries, Ltd. Process for pulling a single crystal
AT400848B (de) * 1984-08-24 1996-03-25 Sony Corp Vorrichtung zum züchten eines einkristalls

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59137399A (ja) * 1983-01-28 1984-08-07 Nippon Telegr & Teleph Corp <Ntt> 低転位密度単結晶の育成方法及びその装置
US4863554A (en) * 1983-08-23 1989-09-05 Sumitomo Electric Industries, Ltd. Process for pulling a single crystal
US4645560A (en) * 1983-08-26 1987-02-24 Sumito Electric Industries, Ltd. Liquid encapsulation method for growing single semiconductor crystals
JPS60221391A (ja) * 1984-04-18 1985-11-06 Toshiba Corp 化合物半導体単結晶育成装置
JPS6144794A (ja) * 1984-08-08 1986-03-04 Hitachi Ltd 発熱体
AT400848B (de) * 1984-08-24 1996-03-25 Sony Corp Vorrichtung zum züchten eines einkristalls

Also Published As

Publication number Publication date
JPS6234717B2 (enExample) 1987-07-28

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