JPS57118094A - Manufacturing apparatus for beltlike silicon crystal - Google Patents

Manufacturing apparatus for beltlike silicon crystal

Info

Publication number
JPS57118094A
JPS57118094A JP17681A JP17681A JPS57118094A JP S57118094 A JPS57118094 A JP S57118094A JP 17681 A JP17681 A JP 17681A JP 17681 A JP17681 A JP 17681A JP S57118094 A JPS57118094 A JP S57118094A
Authority
JP
Japan
Prior art keywords
crystal
seed crystal
platelike
slit
beltlike
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17681A
Other languages
Japanese (ja)
Other versions
JPS5914432B2 (en
Inventor
Toshiro Matsui
Hitoshi Hirano
Koji Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP17681A priority Critical patent/JPS5914432B2/en
Publication of JPS57118094A publication Critical patent/JPS57118094A/en
Publication of JPS5914432B2 publication Critical patent/JPS5914432B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To manufacture a thin beltlike silicon crystal with no surface unevenness by attaching a platelike seed crystal to a platelike seed crystal holder and pulling up a crystal through the passage of a seed crystal guide.
CONSTITUTION: A capillary die 131, 132 having a slit is put in a crucible 11 holding molten silicon 12, and a seed crystal is brought into contact with molten silicon rising through the slit to manufacture a beltlike silicon crystal 23 by pulling. In this method a seed crystal guide 211, 212 having a passage which is narrower than the slit and communicates with the slit is formed on the die 131, 132, the platelike seed crystal is attached to a platelike seed crystal holder 24 so that they bite each other at ≥4 slanting surfaces, and the crystal puling is carried out through the passage of the guide 211, 212. Thus, a beltlike silicon crystal having a small and uniform thickness and small surface unevenness can be pulled up and grown continuously.
COPYRIGHT: (C)1982,JPO&Japio
JP17681A 1981-01-06 1981-01-06 Band-shaped silicon crystal production equipment Expired JPS5914432B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17681A JPS5914432B2 (en) 1981-01-06 1981-01-06 Band-shaped silicon crystal production equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17681A JPS5914432B2 (en) 1981-01-06 1981-01-06 Band-shaped silicon crystal production equipment

Publications (2)

Publication Number Publication Date
JPS57118094A true JPS57118094A (en) 1982-07-22
JPS5914432B2 JPS5914432B2 (en) 1984-04-04

Family

ID=11466693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17681A Expired JPS5914432B2 (en) 1981-01-06 1981-01-06 Band-shaped silicon crystal production equipment

Country Status (1)

Country Link
JP (1) JPS5914432B2 (en)

Also Published As

Publication number Publication date
JPS5914432B2 (en) 1984-04-04

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