JPS57118094A - Manufacturing apparatus for beltlike silicon crystal - Google Patents
Manufacturing apparatus for beltlike silicon crystalInfo
- Publication number
- JPS57118094A JPS57118094A JP17681A JP17681A JPS57118094A JP S57118094 A JPS57118094 A JP S57118094A JP 17681 A JP17681 A JP 17681A JP 17681 A JP17681 A JP 17681A JP S57118094 A JPS57118094 A JP S57118094A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- seed crystal
- platelike
- slit
- beltlike
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To manufacture a thin beltlike silicon crystal with no surface unevenness by attaching a platelike seed crystal to a platelike seed crystal holder and pulling up a crystal through the passage of a seed crystal guide.
CONSTITUTION: A capillary die 131, 132 having a slit is put in a crucible 11 holding molten silicon 12, and a seed crystal is brought into contact with molten silicon rising through the slit to manufacture a beltlike silicon crystal 23 by pulling. In this method a seed crystal guide 211, 212 having a passage which is narrower than the slit and communicates with the slit is formed on the die 131, 132, the platelike seed crystal is attached to a platelike seed crystal holder 24 so that they bite each other at ≥4 slanting surfaces, and the crystal puling is carried out through the passage of the guide 211, 212. Thus, a beltlike silicon crystal having a small and uniform thickness and small surface unevenness can be pulled up and grown continuously.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17681A JPS5914432B2 (en) | 1981-01-06 | 1981-01-06 | Band-shaped silicon crystal production equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17681A JPS5914432B2 (en) | 1981-01-06 | 1981-01-06 | Band-shaped silicon crystal production equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57118094A true JPS57118094A (en) | 1982-07-22 |
JPS5914432B2 JPS5914432B2 (en) | 1984-04-04 |
Family
ID=11466693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17681A Expired JPS5914432B2 (en) | 1981-01-06 | 1981-01-06 | Band-shaped silicon crystal production equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5914432B2 (en) |
-
1981
- 1981-01-06 JP JP17681A patent/JPS5914432B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5914432B2 (en) | 1984-04-04 |
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