JPS57117273A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57117273A JPS57117273A JP265581A JP265581A JPS57117273A JP S57117273 A JPS57117273 A JP S57117273A JP 265581 A JP265581 A JP 265581A JP 265581 A JP265581 A JP 265581A JP S57117273 A JPS57117273 A JP S57117273A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor layer
- silicon semiconductor
- energy level
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 5
- 229910052710 silicon Inorganic materials 0.000 abstract 5
- 239000010703 silicon Substances 0.000 abstract 5
- 239000012535 impurity Substances 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000000969 carrier Substances 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000003507 refrigerant Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE:To prevent generation of compressive stress to be caused by noncoincidence of lattice interval of a semiconductor device by a method wherein impurities having sufficiently deep energy level to convert a silicon semiconductor layer into a semiisulating layer are implanted in the silicon semiconductor layer. CONSTITUTION:The second conductive type impurities having sufficiently deep energy level to convert a first conductive type silicon semiconductor layer 11 into a semiinsulating layer and to compensate for free carriers are implanted in the silicon semiconductor layer 11 to form the semiinsulating silicon layer 12. When the semiconductor device is to be used using liquid nitrogen as refrigerant, the energy level of impurities is made to be separated by 0.2eV or more from the conductive band to be formed according to the type conductive carriers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP265581A JPS57117273A (en) | 1981-01-13 | 1981-01-13 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP265581A JPS57117273A (en) | 1981-01-13 | 1981-01-13 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57117273A true JPS57117273A (en) | 1982-07-21 |
Family
ID=11535355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP265581A Pending JPS57117273A (en) | 1981-01-13 | 1981-01-13 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57117273A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5964536A (en) * | 1996-09-26 | 1999-10-12 | Fuji Kiko Co., Ltd. | Bearing for a vehicle steering column |
-
1981
- 1981-01-13 JP JP265581A patent/JPS57117273A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5964536A (en) * | 1996-09-26 | 1999-10-12 | Fuji Kiko Co., Ltd. | Bearing for a vehicle steering column |
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