JPS57114358A - Blade and its manufacture - Google Patents
Blade and its manufactureInfo
- Publication number
- JPS57114358A JPS57114358A JP56000137A JP13781A JPS57114358A JP S57114358 A JPS57114358 A JP S57114358A JP 56000137 A JP56000137 A JP 56000137A JP 13781 A JP13781 A JP 13781A JP S57114358 A JPS57114358 A JP S57114358A
- Authority
- JP
- Japan
- Prior art keywords
- blade
- peripheral part
- face
- work
- side faces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
PURPOSE:To prevent generation of chippings in the side face of a blade when a semiconductor wafer is treated by groove cutting, by forming both side faces of the blade to hollowed surfaces and decreasing thickness of the blade in accordance with its position from the peripheral part to the internal peripheral part. CONSTITUTION:At groove cutting work of a semiconductor wafer, such a blade 11 is used that its thickness is smaller in accordance with a position of the blade from the peripheral part to the internal peripheral part of an annularly formed ground part 13 further both side faces 14, 15 of the above described ground part 13 are formed to hollowed surfaces respectively. This blade 11 is manufactured in such a manner that one of the faces of a blade base material with both side faces in a plane is adhesively fixed to a base plate 31 to process lapping work on a lapping machine 33 consisting of a convex spherical surface with radius R, thus perform lapping work of one face of the above described blade base material, and then lapping work is similarly performed to complete the other face.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56000137A JPS57114358A (en) | 1981-01-06 | 1981-01-06 | Blade and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56000137A JPS57114358A (en) | 1981-01-06 | 1981-01-06 | Blade and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57114358A true JPS57114358A (en) | 1982-07-16 |
Family
ID=11465636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56000137A Pending JPS57114358A (en) | 1981-01-06 | 1981-01-06 | Blade and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57114358A (en) |
-
1981
- 1981-01-06 JP JP56000137A patent/JPS57114358A/en active Pending
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