JPS51111993A - Apparatus for fabricating thin work as semiconductor or the like - Google Patents
Apparatus for fabricating thin work as semiconductor or the likeInfo
- Publication number
- JPS51111993A JPS51111993A JP50036033A JP3603375A JPS51111993A JP S51111993 A JPS51111993 A JP S51111993A JP 50036033 A JP50036033 A JP 50036033A JP 3603375 A JP3603375 A JP 3603375A JP S51111993 A JPS51111993 A JP S51111993A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- fabricating thin
- thin work
- work
- fabricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
PURPOSE:To provide a surface polishing machine enabling of avoiding crack of wafer, irregularity of thicknesses of the wafers after polishing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50036033A JPS51111993A (en) | 1975-03-27 | 1975-03-27 | Apparatus for fabricating thin work as semiconductor or the like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50036033A JPS51111993A (en) | 1975-03-27 | 1975-03-27 | Apparatus for fabricating thin work as semiconductor or the like |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51111993A true JPS51111993A (en) | 1976-10-02 |
Family
ID=12458392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50036033A Pending JPS51111993A (en) | 1975-03-27 | 1975-03-27 | Apparatus for fabricating thin work as semiconductor or the like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51111993A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55157471A (en) * | 1979-05-19 | 1980-12-08 | Nippon Telegr & Teleph Corp <Ntt> | Dish for bonding workpieces |
JPS58137555A (en) * | 1982-02-09 | 1983-08-16 | Kyocera Corp | Polishing board and polishing method using it |
JPS59124564A (en) * | 1982-12-28 | 1984-07-18 | Kyocera Corp | Waxing tool and wax application using it |
JPS59167141U (en) * | 1983-04-21 | 1984-11-09 | 旭化成株式会社 | Bathroom equipment duct |
JPH09129712A (en) * | 1996-07-29 | 1997-05-16 | Canon Inc | Semiconductor manufacturing apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4899796A (en) * | 1972-03-30 | 1973-12-17 |
-
1975
- 1975-03-27 JP JP50036033A patent/JPS51111993A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4899796A (en) * | 1972-03-30 | 1973-12-17 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55157471A (en) * | 1979-05-19 | 1980-12-08 | Nippon Telegr & Teleph Corp <Ntt> | Dish for bonding workpieces |
JPS5742472B2 (en) * | 1979-05-19 | 1982-09-08 | ||
JPS58137555A (en) * | 1982-02-09 | 1983-08-16 | Kyocera Corp | Polishing board and polishing method using it |
JPS59124564A (en) * | 1982-12-28 | 1984-07-18 | Kyocera Corp | Waxing tool and wax application using it |
JPH0424188B2 (en) * | 1982-12-28 | 1992-04-24 | Kyocera Corp | |
JPS59167141U (en) * | 1983-04-21 | 1984-11-09 | 旭化成株式会社 | Bathroom equipment duct |
JPH0220343Y2 (en) * | 1983-04-21 | 1990-06-04 | ||
JPH09129712A (en) * | 1996-07-29 | 1997-05-16 | Canon Inc | Semiconductor manufacturing apparatus |
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