JPS57114252A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57114252A JPS57114252A JP47781A JP47781A JPS57114252A JP S57114252 A JPS57114252 A JP S57114252A JP 47781 A JP47781 A JP 47781A JP 47781 A JP47781 A JP 47781A JP S57114252 A JPS57114252 A JP S57114252A
- Authority
- JP
- Japan
- Prior art keywords
- wire
- aluminum
- layer
- thickness
- disconnection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent the disconnection of an aluminum wire on an upper layer by smoothly forming a contacting hole step at the contacting hole part formed at an SiO2 insulating layer on a polysilicon wire in the wire of a semiconductor device. CONSTITUTION:When an SiO2 insulating layer 4 is formed on a polysilicon wire 2' on a semiconductor substrate 1 and a contacting hole 5' is formed at the layer 4, its position X is sufficiently spaced from the end Y of the wire 2' so as to have a thickness 4 times of the thickness t of the wire 2'. Thus, when aluminum is deposited, it can prevent the disconnection of a wire due to the reduction in the thickness of the aluminum film at the step formed at the layer 4 on the end Y and the disconnection of the aluminum wire due to the reduction in the thickness of the resist at the step similarly due to the flow of the resist in case of photoetching the aluminum wire layer formed thereafter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47781A JPS57114252A (en) | 1981-01-07 | 1981-01-07 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47781A JPS57114252A (en) | 1981-01-07 | 1981-01-07 | Semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57114252A true JPS57114252A (en) | 1982-07-16 |
Family
ID=11474853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47781A Pending JPS57114252A (en) | 1981-01-07 | 1981-01-07 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57114252A (en) |
-
1981
- 1981-01-07 JP JP47781A patent/JPS57114252A/en active Pending
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