JPS52149983A - Production of mos type semiconductor device - Google Patents

Production of mos type semiconductor device

Info

Publication number
JPS52149983A
JPS52149983A JP6735376A JP6735376A JPS52149983A JP S52149983 A JPS52149983 A JP S52149983A JP 6735376 A JP6735376 A JP 6735376A JP 6735376 A JP6735376 A JP 6735376A JP S52149983 A JPS52149983 A JP S52149983A
Authority
JP
Japan
Prior art keywords
oxide film
production
semiconductor device
type semiconductor
mos type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6735376A
Other languages
Japanese (ja)
Inventor
Mineto Tobinaga
Kimio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6735376A priority Critical patent/JPS52149983A/en
Publication of JPS52149983A publication Critical patent/JPS52149983A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent under-etching of gate oxide film by stopping etching at the point when an auxiliary oxide film has exposed at the time of providing a gate oxide film having a gate layer in required portions and an auxiliary oxide film on a semiconductor substrate and etching the filed oxide film deposited over these.
COPYRIGHT: (C)1977,JPO&Japio
JP6735376A 1976-06-08 1976-06-08 Production of mos type semiconductor device Pending JPS52149983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6735376A JPS52149983A (en) 1976-06-08 1976-06-08 Production of mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6735376A JPS52149983A (en) 1976-06-08 1976-06-08 Production of mos type semiconductor device

Publications (1)

Publication Number Publication Date
JPS52149983A true JPS52149983A (en) 1977-12-13

Family

ID=13342560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6735376A Pending JPS52149983A (en) 1976-06-08 1976-06-08 Production of mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS52149983A (en)

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