JPS5246786A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5246786A
JPS5246786A JP12182775A JP12182775A JPS5246786A JP S5246786 A JPS5246786 A JP S5246786A JP 12182775 A JP12182775 A JP 12182775A JP 12182775 A JP12182775 A JP 12182775A JP S5246786 A JPS5246786 A JP S5246786A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
main surface
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12182775A
Other languages
Japanese (ja)
Other versions
JPS5733860B2 (en
Inventor
Noboru Horie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12182775A priority Critical patent/JPS5246786A/en
Publication of JPS5246786A publication Critical patent/JPS5246786A/en
Publication of JPS5733860B2 publication Critical patent/JPS5733860B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To form a groove of V - or U - form in cross section by etching along the entire circumferential edge of the main surface of a semiconductor and form a laminate of a semiconductor oxide film and insulating film on the entire surface of the main surface, thereby preventing troubles owing to entry of moisture.
COPYRIGHT: (C)1977,JPO&Japio
JP12182775A 1975-10-11 1975-10-11 Semiconductor integrated circuit device Granted JPS5246786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12182775A JPS5246786A (en) 1975-10-11 1975-10-11 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12182775A JPS5246786A (en) 1975-10-11 1975-10-11 Semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS5246786A true JPS5246786A (en) 1977-04-13
JPS5733860B2 JPS5733860B2 (en) 1982-07-20

Family

ID=14820900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12182775A Granted JPS5246786A (en) 1975-10-11 1975-10-11 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5246786A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62177835U (en) * 1986-04-30 1987-11-11

Also Published As

Publication number Publication date
JPS5733860B2 (en) 1982-07-20

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