JPS57114223A - Semiconductor wafer - Google Patents

Semiconductor wafer

Info

Publication number
JPS57114223A
JPS57114223A JP152181A JP152181A JPS57114223A JP S57114223 A JPS57114223 A JP S57114223A JP 152181 A JP152181 A JP 152181A JP 152181 A JP152181 A JP 152181A JP S57114223 A JPS57114223 A JP S57114223A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
discrimination
air
penetrating hole
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP152181A
Other languages
English (en)
Inventor
Yasuo Taki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP152181A priority Critical patent/JPS57114223A/ja
Publication of JPS57114223A publication Critical patent/JPS57114223A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
JP152181A 1981-01-07 1981-01-07 Semiconductor wafer Pending JPS57114223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP152181A JPS57114223A (en) 1981-01-07 1981-01-07 Semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP152181A JPS57114223A (en) 1981-01-07 1981-01-07 Semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS57114223A true JPS57114223A (en) 1982-07-16

Family

ID=11503797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP152181A Pending JPS57114223A (en) 1981-01-07 1981-01-07 Semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS57114223A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100516070B1 (ko) * 2003-05-30 2005-09-22 삼성코닝정밀유리 주식회사 틸팅 이송 라인스캔 검사 시스템

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100516070B1 (ko) * 2003-05-30 2005-09-22 삼성코닝정밀유리 주식회사 틸팅 이송 라인스캔 검사 시스템

Similar Documents

Publication Publication Date Title
CA2039257A1 (en) Measuring method and apparatus
ES457673A1 (es) Metodo de clasificacion de carretes y tubos hiladores usa- dos en tal metodo.
EP0368625A3 (en) Method and apparatus for forming layout pattern of semiconductor integrated circuit
GB1427695A (en) Signal processing system
JPS57114223A (en) Semiconductor wafer
US6303899B1 (en) Method and apparatus for scribing a code in an inactive outer clear out area of a semiconductor wafer
GB1477871A (en) Method and apparatus for making a pattern by electron beam alignment on a semiconductor member
EP0338889A3 (en) Process for forming dicing lines on wafer
CA2077359A1 (en) X-ray mask and semiconductor device manufacturing method using the same
GB1467521A (en) Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers for fabricating circuit patterns
JPS5788451A (en) Photomask
JPS55123142A (en) Rotation positioing method for semiconductor wafer
JPS6469023A (en) Inspection device for surface of wafer
JPS5728333A (en) Method for detecting aligning mark
JPH02264448A (ja) 半導体集積回路
JPS5741714A (en) Position detecting and positioning method
JPS55125640A (en) Automatic chip selection apparatus
JPS5541668A (en) Detecting method of character position
JPS5678765A (en) Sorter
JPS5488083A (en) Manufacture for semiconductor device
JPS5315076A (en) Electron beam position detection method
JPS5779646A (en) Semiconductor wafer
JPS569874A (en) Optical type character reader
JPS5238246A (en) Position detecting device
JPS57109352A (en) Position sensing apparatus