JPS57104238A - Inspection device for semiconductor wafer - Google Patents
Inspection device for semiconductor waferInfo
- Publication number
- JPS57104238A JPS57104238A JP18148380A JP18148380A JPS57104238A JP S57104238 A JPS57104238 A JP S57104238A JP 18148380 A JP18148380 A JP 18148380A JP 18148380 A JP18148380 A JP 18148380A JP S57104238 A JPS57104238 A JP S57104238A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- inspection
- chips
- inspected
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18148380A JPS57104238A (en) | 1980-12-22 | 1980-12-22 | Inspection device for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18148380A JPS57104238A (en) | 1980-12-22 | 1980-12-22 | Inspection device for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57104238A true JPS57104238A (en) | 1982-06-29 |
Family
ID=16101540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18148380A Pending JPS57104238A (en) | 1980-12-22 | 1980-12-22 | Inspection device for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57104238A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60211956A (ja) * | 1984-04-06 | 1985-10-24 | Tokyo Seimitsu Co Ltd | プロ−ビングマシン |
-
1980
- 1980-12-22 JP JP18148380A patent/JPS57104238A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60211956A (ja) * | 1984-04-06 | 1985-10-24 | Tokyo Seimitsu Co Ltd | プロ−ビングマシン |
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