JPS5710403A - Compensator - Google Patents

Compensator

Info

Publication number
JPS5710403A
JPS5710403A JP5043681A JP5043681A JPS5710403A JP S5710403 A JPS5710403 A JP S5710403A JP 5043681 A JP5043681 A JP 5043681A JP 5043681 A JP5043681 A JP 5043681A JP S5710403 A JPS5710403 A JP S5710403A
Authority
JP
Japan
Prior art keywords
prism
laser
laser interferometer
compensating device
stationary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5043681A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0216442B2 (OSRAM
Inventor
Uesuteruberugu Geruharudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIKURONITSUKU AB
Original Assignee
MIKURONITSUKU AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MIKURONITSUKU AB filed Critical MIKURONITSUKU AB
Publication of JPS5710403A publication Critical patent/JPS5710403A/ja
Publication of JPH0216442B2 publication Critical patent/JPH0216442B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5043681A 1980-04-03 1981-04-03 Compensator Granted JPS5710403A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8002604A SE445778B (sv) 1980-04-03 1980-04-03 Kompensationsanordning vid en laserinterferometer

Publications (2)

Publication Number Publication Date
JPS5710403A true JPS5710403A (en) 1982-01-20
JPH0216442B2 JPH0216442B2 (OSRAM) 1990-04-17

Family

ID=20340687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5043681A Granted JPS5710403A (en) 1980-04-03 1981-04-03 Compensator

Country Status (5)

Country Link
US (1) US4385835A (OSRAM)
JP (1) JPS5710403A (OSRAM)
FR (1) FR2479974B1 (OSRAM)
GB (1) GB2073414B (OSRAM)
SE (1) SE445778B (OSRAM)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable
JPS60253945A (ja) * 1984-05-31 1985-12-14 Matsushita Electric Ind Co Ltd 形状測定装置
US4884697A (en) * 1988-06-21 1989-12-05 Takacs Peter Z Surface profiling interferometer
US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry
JP4032841B2 (ja) * 2002-06-21 2008-01-16 株式会社島津製作所 二光束干渉計の固定鏡調整方法
DE102005046605A1 (de) * 2005-09-29 2007-04-05 Robert Bosch Gmbh Interferometrische Messeinrichtung
DE102006001732A1 (de) * 2006-01-13 2007-07-19 Robert Bosch Gmbh Interferometrische Messvorrichtung
US20100020331A1 (en) * 2008-07-25 2010-01-28 Micronic Laser Systems Ab Laser interferometer systems and methods with suppressed error and pattern generators having the same
US10545016B2 (en) * 2016-08-18 2020-01-28 Nec Corporation Light measurement device and optical axis adjustment method
US11231272B2 (en) * 2017-11-16 2022-01-25 Nec Corporation Optical measuring apparatus and optical measuring method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520613A (en) * 1966-11-14 1970-07-14 Optomechanisms Inc Interferometer with environmental correction computer
US3809481A (en) * 1972-12-01 1974-05-07 Nasa Single reflector interference spectrometer and drive system therefor
US4053231A (en) * 1975-12-18 1977-10-11 Nasa Interferometer mirror tilt correcting system

Also Published As

Publication number Publication date
JPH0216442B2 (OSRAM) 1990-04-17
GB2073414A (en) 1981-10-14
GB2073414B (en) 1984-02-15
US4385835A (en) 1983-05-31
SE445778B (sv) 1986-07-14
FR2479974B1 (fr) 1986-08-08
FR2479974A1 (fr) 1981-10-09
SE8002604L (sv) 1981-10-04

Similar Documents

Publication Publication Date Title
DE59102110D1 (en) Interferometer.
GB2073414B (en) Compensating device for an interferometer
EP0311144A3 (en) Optical instrument for measuring displacement
GB1472894A (en) Interferometric methods and apparatus for measuring distance to a surface
DE3483191D1 (de) Laengenmessvorrichtung nach dem zweistrahl-laser-interferometerprinzip.
WO1991013317A3 (de) Interferometer zur lage- bzw. verschiebewegbestimmung eines beweglichen messspiegels oder dergleichen
GB1392395A (en) Stabilization of optical path length differences
EP0277496A3 (en) Laser interferometer-refractometer
GB1108214A (en) Interferometric measuring system
FR2368055A1 (fr) Interferometre non lineaire
GB2202938B (en) Measuring device employing laser interferometry
GB1010277A (en) Improvements in and relating to optical interforometers
EP0359157A3 (de) Symmetrische zweiarmige Einrichtung zum Messen von Längen mit einem Interferometer
GB1176019A (en) Method of and Apparatus for Measuring Lengths by Optical Interferometry.
JPS5742824A (en) Method and device for sequential determination of light wavelength
GB2020845A (en) Optical Compensation of Measuring Errors
GB8404808D0 (en) Interferometer spectrometer
RU2008653C1 (ru) Интерференционный рефрактометр
FR2455271A1 (fr) Procede de mesure du taux de fuite d'une enceinte etanche sous pression par variation de l'indice de refraction, et dispositif de mise en oeuvre
SU844592A1 (ru) Устройство дл измерени напр женийВ СТЕКлЕ
JPS53113572A (en) Dispersion characteristic measuring device of optical fiber
SU1396717A1 (ru) Фотоэлектрический интерферометр для измерения перемещения
JPS6484104A (en) Laser interference length measuring machine
JPS6465403A (en) Laser length measuring machine for xy stage positioning
GB1495378A (en) Photometer for microscopes