JPS5696888A - Semiconductor light emitting device - Google Patents
Semiconductor light emitting deviceInfo
- Publication number
- JPS5696888A JPS5696888A JP17119079A JP17119079A JPS5696888A JP S5696888 A JPS5696888 A JP S5696888A JP 17119079 A JP17119079 A JP 17119079A JP 17119079 A JP17119079 A JP 17119079A JP S5696888 A JPS5696888 A JP S5696888A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- active layer
- type inp
- ingaasp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
Landscapes
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To obtain the stable lateral mode in the light emitting device wherein a light confining layer is embeded in a clad layer which holds an active layer in- between with a stripe region being remained, by controlling the diffusion of lateral carriers by the P-N junctions formed in an active layer. CONSTITUTION:On an N type InP substrate 1, are layered an N type InP clad 2, a nonadded InGaAsP active layer 3, a P type InP clad 4, an N type InGaAsP light confining layer 5. Then, by using an SiO2 mask, the layer 5 is etched 5A in a stripe shape with a blended liquid of H2O2-H2SO4-H2O. Thereafter, P type InP clad layer 6 and P type InGaAsP 7 are layered. As impurities, Te is used for the layers 2 and 4, Cd for the layer 5, and a large amount of Zn for the layers 6 and 7. Therefore, only the part 3A of the active layer is transformed into P type by Zn and the P-N junction is formed between the part 3B and said part 3A. An electrode 8 is made of Au-Zn and an electrode 9 is made of Au-Ge-Ni. In this constitution, even though the stripe width is narrow, the threshold current can be sufficiently decreased, the confinement of the light is excellent, and the lateral mode can be stabilized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17119079A JPS5696888A (en) | 1979-12-29 | 1979-12-29 | Semiconductor light emitting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17119079A JPS5696888A (en) | 1979-12-29 | 1979-12-29 | Semiconductor light emitting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5696888A true JPS5696888A (en) | 1981-08-05 |
Family
ID=15918668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17119079A Pending JPS5696888A (en) | 1979-12-29 | 1979-12-29 | Semiconductor light emitting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5696888A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS603180A (en) * | 1983-06-21 | 1985-01-09 | Toshiba Corp | Semiconductor laser device |
-
1979
- 1979-12-29 JP JP17119079A patent/JPS5696888A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS603180A (en) * | 1983-06-21 | 1985-01-09 | Toshiba Corp | Semiconductor laser device |
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