JPS5688372A - Manufacture of semiconductor diaphragm - Google Patents

Manufacture of semiconductor diaphragm

Info

Publication number
JPS5688372A
JPS5688372A JP16601479A JP16601479A JPS5688372A JP S5688372 A JPS5688372 A JP S5688372A JP 16601479 A JP16601479 A JP 16601479A JP 16601479 A JP16601479 A JP 16601479A JP S5688372 A JPS5688372 A JP S5688372A
Authority
JP
Japan
Prior art keywords
substrate
diaphragm
etching
thickness
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16601479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154268B2 (enExample
Inventor
Yutaka Mihashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP16601479A priority Critical patent/JPS5688372A/ja
Publication of JPS5688372A publication Critical patent/JPS5688372A/ja
Publication of JPS6154268B2 publication Critical patent/JPS6154268B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching

Landscapes

  • Pressure Sensors (AREA)
JP16601479A 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm Granted JPS5688372A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16601479A JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16601479A JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Publications (2)

Publication Number Publication Date
JPS5688372A true JPS5688372A (en) 1981-07-17
JPS6154268B2 JPS6154268B2 (enExample) 1986-11-21

Family

ID=15823297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16601479A Granted JPS5688372A (en) 1979-12-19 1979-12-19 Manufacture of semiconductor diaphragm

Country Status (1)

Country Link
JP (1) JPS5688372A (enExample)

Also Published As

Publication number Publication date
JPS6154268B2 (enExample) 1986-11-21

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