JPS5683844A - Production of ultrafine-grained film disc - Google Patents
Production of ultrafine-grained film discInfo
- Publication number
- JPS5683844A JPS5683844A JP16098079A JP16098079A JPS5683844A JP S5683844 A JPS5683844 A JP S5683844A JP 16098079 A JP16098079 A JP 16098079A JP 16098079 A JP16098079 A JP 16098079A JP S5683844 A JPS5683844 A JP S5683844A
- Authority
- JP
- Japan
- Prior art keywords
- disc
- ultrafine grains
- ultrafine
- pressure reduction
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
- C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16098079A JPS5683844A (en) | 1979-12-11 | 1979-12-11 | Production of ultrafine-grained film disc |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16098079A JPS5683844A (en) | 1979-12-11 | 1979-12-11 | Production of ultrafine-grained film disc |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5683844A true JPS5683844A (en) | 1981-07-08 |
Family
ID=15726277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16098079A Pending JPS5683844A (en) | 1979-12-11 | 1979-12-11 | Production of ultrafine-grained film disc |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5683844A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746868A (en) * | 1994-07-21 | 1998-05-05 | Fujitsu Limited | Method of manufacturing multilayer circuit substrate |
-
1979
- 1979-12-11 JP JP16098079A patent/JPS5683844A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5746868A (en) * | 1994-07-21 | 1998-05-05 | Fujitsu Limited | Method of manufacturing multilayer circuit substrate |
US5976393A (en) * | 1994-07-21 | 1999-11-02 | Fujitsu Limited | Method of manufacturing multilayer circuit substrate |
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