JPS5472973A - Rotary applying unit - Google Patents
Rotary applying unitInfo
- Publication number
- JPS5472973A JPS5472973A JP13997877A JP13997877A JPS5472973A JP S5472973 A JPS5472973 A JP S5472973A JP 13997877 A JP13997877 A JP 13997877A JP 13997877 A JP13997877 A JP 13997877A JP S5472973 A JPS5472973 A JP S5472973A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- applying unit
- container
- applied body
- sticking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent flying matter from sticking to an application surface, by providing a bounce preventive board whose diameter is nerly equal to an applied body to a rotary applying unit, which has a coating dropping aperture at the center part of the upper part of the rotating applied body in a plate shape, while covering the applied body.
CONSTITUTION: Rotary axis 3 is made to pierce the applying unit composed of container part 1 and cover part 2, and onto this axis 3, the wafer fixing pedestal on which semiconductor wafer 5 is mouted is fixed. Then, skirt ring 6 is fixed to the flank of container 1 surrounding wafer 5, and the container bottom part is provided with exhaust duct 7. Next, although nozzle 8 dropping a coating material is provided over wafer 5 at an interval, bounce preventive board 9 which is nearly equal in diameter to wafer 5 and has an opening at its center is arranged between nozzle 8 and wafer 5 at an interval of about lcm in parallel to them, by supportt 10 provided to cover 2. consequently, the coating material flying irregularly from skirt ring 6 sticks to preventive board 9, so that its sticking to wafer 5 will be reduced.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13997877A JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13997877A JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5472973A true JPS5472973A (en) | 1979-06-11 |
Family
ID=15258088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13997877A Pending JPS5472973A (en) | 1977-11-24 | 1977-11-24 | Rotary applying unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5472973A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS592134U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | Rotary coating device |
JPS6146028A (en) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | Resist coater |
JPS62140674A (en) * | 1985-12-12 | 1987-06-24 | Matsushita Electric Ind Co Ltd | Resist coater |
JPS6470168A (en) * | 1987-09-11 | 1989-03-15 | Hitachi Ltd | Liquid chemical applicator |
JPH01254277A (en) * | 1988-03-31 | 1989-10-11 | Matsushita Electric Ind Co Ltd | Spinner rotation treatment apparatus |
-
1977
- 1977-11-24 JP JP13997877A patent/JPS5472973A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57121227A (en) * | 1981-01-20 | 1982-07-28 | Toshiba Corp | Resist applying device |
JPS6217851B2 (en) * | 1981-01-20 | 1987-04-20 | Tokyo Shibaura Electric Co | |
JPS592134U (en) * | 1982-06-28 | 1984-01-09 | 株式会社東芝 | Rotary coating device |
JPS6339966Y2 (en) * | 1982-06-28 | 1988-10-19 | ||
JPS6146028A (en) * | 1984-08-10 | 1986-03-06 | Fujitsu Ltd | Resist coater |
JPS62140674A (en) * | 1985-12-12 | 1987-06-24 | Matsushita Electric Ind Co Ltd | Resist coater |
JPS6470168A (en) * | 1987-09-11 | 1989-03-15 | Hitachi Ltd | Liquid chemical applicator |
JPH01254277A (en) * | 1988-03-31 | 1989-10-11 | Matsushita Electric Ind Co Ltd | Spinner rotation treatment apparatus |
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