JPS5671985A - Semiconductor light receiving system - Google Patents
Semiconductor light receiving systemInfo
- Publication number
- JPS5671985A JPS5671985A JP14982179A JP14982179A JPS5671985A JP S5671985 A JPS5671985 A JP S5671985A JP 14982179 A JP14982179 A JP 14982179A JP 14982179 A JP14982179 A JP 14982179A JP S5671985 A JPS5671985 A JP S5671985A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light receiving
- mask
- applying
- receiving system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000006798 recombination Effects 0.000 abstract 2
- 238000005215 recombination Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PN homojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/03529—Shape of the potential jump barrier or surface barrier
Abstract
PURPOSE:To prevent a carrier recombination and leakage and to obtain a high quantum efficiency by a method wherein a salient part is installed on an N<+> type substrate surface and an N layer is laid thereupon, then, the whole surface is coated and the N layer is installed and a P layer is selectively installed striding over the salient part. CONSTITUTION:An N epitaxial layer is laid upon an N<+> type substrate and applying a mask 71, it is etched to form N layers 26, 28. Next thereto, an N layer 29 is formed in an epitaxial growth, thus completing a basic body 31. The mask 71 is removed and applying an SiO2 mask 37, a P layer 40 is formed and electrodes 38, 39 are formed. Lattice constants of an N layer 30 including layers 28, 29, the N layer 26 and the N<+> substrate are made approximately equal and a forbidden band gap of the N layer 26 is made narrower than those of others, thus, the N layer is made substantially a photosensitive layer. On this account, on the light receiving surface 27, recombination of carrier or a leak current are hardly generated. In this way, in comparison with the existing system, a light receiving system having a sharply higher quantum efficiency is obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14982179A JPS5671985A (en) | 1979-11-19 | 1979-11-19 | Semiconductor light receiving system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14982179A JPS5671985A (en) | 1979-11-19 | 1979-11-19 | Semiconductor light receiving system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5671985A true JPS5671985A (en) | 1981-06-15 |
Family
ID=15483427
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14982179A Pending JPS5671985A (en) | 1979-11-19 | 1979-11-19 | Semiconductor light receiving system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5671985A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5681984A (en) * | 1979-12-06 | 1981-07-04 | Mitsubishi Electric Corp | Semiconductor device |
EP0163546A2 (en) * | 1984-05-31 | 1985-12-04 | Fujitsu Limited | Process for fabricating an avalanche photodiode and an avalanche photodiode thus-obtained |
-
1979
- 1979-11-19 JP JP14982179A patent/JPS5671985A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5681984A (en) * | 1979-12-06 | 1981-07-04 | Mitsubishi Electric Corp | Semiconductor device |
JPS6222475B2 (en) * | 1979-12-06 | 1987-05-18 | Mitsubishi Electric Corp | |
EP0163546A2 (en) * | 1984-05-31 | 1985-12-04 | Fujitsu Limited | Process for fabricating an avalanche photodiode and an avalanche photodiode thus-obtained |
US4840916A (en) * | 1984-05-31 | 1989-06-20 | Fujitsu Limited | Process for fabricating an avalanche photodiode |
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