JPS5669369A - Plasma treating apparatus - Google Patents
Plasma treating apparatusInfo
- Publication number
- JPS5669369A JPS5669369A JP14386979A JP14386979A JPS5669369A JP S5669369 A JPS5669369 A JP S5669369A JP 14386979 A JP14386979 A JP 14386979A JP 14386979 A JP14386979 A JP 14386979A JP S5669369 A JPS5669369 A JP S5669369A
- Authority
- JP
- Japan
- Prior art keywords
- substance
- plasma
- treating apparatus
- treating
- steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Powder Metallurgy (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14386979A JPS5669369A (en) | 1979-11-08 | 1979-11-08 | Plasma treating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14386979A JPS5669369A (en) | 1979-11-08 | 1979-11-08 | Plasma treating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5669369A true JPS5669369A (en) | 1981-06-10 |
Family
ID=15348878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14386979A Pending JPS5669369A (en) | 1979-11-08 | 1979-11-08 | Plasma treating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669369A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2560892A1 (fr) * | 1984-03-12 | 1985-09-13 | Peugeot | Procede de traitement superficiel de pieces en acier ou en fonte par bombardement ionique |
WO2000055386A1 (de) * | 1999-03-17 | 2000-09-21 | Siemens Aktiengesellschaft | Beheizungseinrichtung |
EP1593751A1 (en) * | 2003-01-14 | 2005-11-09 | Tokyo Electron Limited | Member of apparatus for plasma treatment, member of treating apparatus, apparatus for plasma treatment, treating apparatus and method of plasma treatment |
US7875154B2 (en) * | 2004-09-15 | 2011-01-25 | Korea Institute Of Energy Research | Preparation method of palladium alloy composite membrane for hydrogen separation |
JP2013082955A (ja) * | 2011-10-06 | 2013-05-09 | Shinto Kogyo Kk | 焼結品の処理方法 |
WO2020026399A1 (ja) * | 2018-08-02 | 2020-02-06 | 株式会社Fuji | 油除去方法、接着方法、組立装置、および大気圧プラズマ装置 |
-
1979
- 1979-11-08 JP JP14386979A patent/JPS5669369A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2560892A1 (fr) * | 1984-03-12 | 1985-09-13 | Peugeot | Procede de traitement superficiel de pieces en acier ou en fonte par bombardement ionique |
WO2000055386A1 (de) * | 1999-03-17 | 2000-09-21 | Siemens Aktiengesellschaft | Beheizungseinrichtung |
EP1593751A1 (en) * | 2003-01-14 | 2005-11-09 | Tokyo Electron Limited | Member of apparatus for plasma treatment, member of treating apparatus, apparatus for plasma treatment, treating apparatus and method of plasma treatment |
EP1593751A4 (en) * | 2003-01-14 | 2008-08-06 | Tokyo Electron Ltd | ELEMENT OF A PLASMA TREATMENT DEVICE, ELEMENT OF A TREATMENT DEVICE, PLASMA TREATMENT DEVICE, TREATMENT DEVICE AND METHOD OF PLASMA TREATMENT |
US7875154B2 (en) * | 2004-09-15 | 2011-01-25 | Korea Institute Of Energy Research | Preparation method of palladium alloy composite membrane for hydrogen separation |
JP2013082955A (ja) * | 2011-10-06 | 2013-05-09 | Shinto Kogyo Kk | 焼結品の処理方法 |
WO2020026399A1 (ja) * | 2018-08-02 | 2020-02-06 | 株式会社Fuji | 油除去方法、接着方法、組立装置、および大気圧プラズマ装置 |
JPWO2020026399A1 (ja) * | 2018-08-02 | 2021-03-18 | 株式会社Fuji | 油除去方法、接着方法、組立装置、および大気圧プラズマ装置 |
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