JPS566484A - Manufacture of solid state light emitting device - Google Patents

Manufacture of solid state light emitting device

Info

Publication number
JPS566484A
JPS566484A JP8238679A JP8238679A JPS566484A JP S566484 A JPS566484 A JP S566484A JP 8238679 A JP8238679 A JP 8238679A JP 8238679 A JP8238679 A JP 8238679A JP S566484 A JPS566484 A JP S566484A
Authority
JP
Japan
Prior art keywords
light emitting
emitting device
etching
solid state
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8238679A
Other languages
Japanese (ja)
Inventor
Yukihiro Hosomi
Masanobu Nojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP8238679A priority Critical patent/JPS566484A/en
Publication of JPS566484A publication Critical patent/JPS566484A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Weting (AREA)
  • Led Devices (AREA)

Abstract

PURPOSE:To easily obtain an isolation groove having necessary size in a solid state light emitting device by masking a P-type side electrode existed in limited manner on the P-type main surface and selectively etching a P-N junction with phosphoric acid as an etching solution to isolate it into a plurality of regions. CONSTITUTION:A film 13 made of photoresist as an etching resistant agent is coated on an N-type main surface and the peripheral side of a pellet 1. Then, the pellet 1 is introduced into a phosphoric acid solution at 160 deg.C to etch it. With the P-type side electrode 5 as a mask the P-type side main surface not protected by the film 13 is selectively etched to form etching grooves 14 thereon.
JP8238679A 1979-06-28 1979-06-28 Manufacture of solid state light emitting device Pending JPS566484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8238679A JPS566484A (en) 1979-06-28 1979-06-28 Manufacture of solid state light emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8238679A JPS566484A (en) 1979-06-28 1979-06-28 Manufacture of solid state light emitting device

Publications (1)

Publication Number Publication Date
JPS566484A true JPS566484A (en) 1981-01-23

Family

ID=13773135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8238679A Pending JPS566484A (en) 1979-06-28 1979-06-28 Manufacture of solid state light emitting device

Country Status (1)

Country Link
JP (1) JPS566484A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184988A (en) * 1982-04-02 1983-10-28 ジャン　ポラール Electro-optic image display
JPWO2006123580A1 (en) * 2005-05-19 2008-12-25 松下電器産業株式会社 Nitride semiconductor device and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58184988A (en) * 1982-04-02 1983-10-28 ジャン　ポラール Electro-optic image display
JPWO2006123580A1 (en) * 2005-05-19 2008-12-25 松下電器産業株式会社 Nitride semiconductor device and manufacturing method thereof
JP4842827B2 (en) * 2005-05-19 2011-12-21 パナソニック株式会社 Nitride semiconductor device and manufacturing method thereof

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