JPS5662370A - Manufacturing of semiconductor device - Google Patents

Manufacturing of semiconductor device

Info

Publication number
JPS5662370A
JPS5662370A JP13839779A JP13839779A JPS5662370A JP S5662370 A JPS5662370 A JP S5662370A JP 13839779 A JP13839779 A JP 13839779A JP 13839779 A JP13839779 A JP 13839779A JP S5662370 A JPS5662370 A JP S5662370A
Authority
JP
Japan
Prior art keywords
film
polycrystal silicon
oxidized
insulation film
base board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13839779A
Other languages
English (en)
Inventor
Tetsuo Akisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13839779A priority Critical patent/JPS5662370A/ja
Publication of JPS5662370A publication Critical patent/JPS5662370A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Formation Of Insulating Films (AREA)
JP13839779A 1979-10-26 1979-10-26 Manufacturing of semiconductor device Pending JPS5662370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13839779A JPS5662370A (en) 1979-10-26 1979-10-26 Manufacturing of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13839779A JPS5662370A (en) 1979-10-26 1979-10-26 Manufacturing of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5662370A true JPS5662370A (en) 1981-05-28

Family

ID=15220985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13839779A Pending JPS5662370A (en) 1979-10-26 1979-10-26 Manufacturing of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5662370A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878465A (ja) * 1981-11-04 1983-05-12 Toshiba Corp 半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389374A (en) * 1977-01-18 1978-08-05 Toshiba Corp Production of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389374A (en) * 1977-01-18 1978-08-05 Toshiba Corp Production of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878465A (ja) * 1981-11-04 1983-05-12 Toshiba Corp 半導体装置の製造方法

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