JPS5661960U - - Google Patents

Info

Publication number
JPS5661960U
JPS5661960U JP1980138035U JP13803580U JPS5661960U JP S5661960 U JPS5661960 U JP S5661960U JP 1980138035 U JP1980138035 U JP 1980138035U JP 13803580 U JP13803580 U JP 13803580U JP S5661960 U JPS5661960 U JP S5661960U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1980138035U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5661960U publication Critical patent/JPS5661960U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1980138035U 1972-08-17 1980-09-26 Pending JPS5661960U (he)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00281375A US3809899A (en) 1972-08-17 1972-08-17 Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5661960U true JPS5661960U (he) 1981-05-26

Family

ID=23077025

Family Applications (3)

Application Number Title Priority Date Filing Date
JP9232973A Expired JPS557661B2 (he) 1972-08-17 1973-08-17
JP13038078A Pending JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator
JP1980138035U Pending JPS5661960U (he) 1972-08-17 1980-09-26

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP9232973A Expired JPS557661B2 (he) 1972-08-17 1973-08-17
JP13038078A Pending JPS54161263A (en) 1972-08-17 1978-10-23 Electron beam generator

Country Status (7)

Country Link
US (1) US3809899A (he)
JP (3) JPS557661B2 (he)
CA (1) CA1031080A (he)
DE (2) DE2341377A1 (he)
FR (2) FR2199613B1 (he)
GB (2) GB1433945A (he)
NL (2) NL7311344A (he)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514266C2 (de) * 1975-03-27 1977-04-28 Siemens Ag Korpuskularstrahloptisches geraet mit zwei in strahlrichtung aufeinanderfolgenden teilraeumen unterschiedlicher druecke
US4175234A (en) * 1977-08-05 1979-11-20 University Of Virginia Apparatus for producing ions of thermally labile or nonvolatile solids
US4139773A (en) * 1977-11-04 1979-02-13 Oregon Graduate Center Method and apparatus for producing bright high resolution ion beams
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
DE3039283A1 (de) * 1979-10-19 1981-05-14 Hitachi, Ltd., Tokyo Feldemissionskathode und verfahren zu ihrer herstellung
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
DE3570012D1 (en) * 1985-01-29 1989-06-08 Ibm Field-emission scanning auger electron microscope
DE69132441T2 (de) * 1990-06-20 2001-06-07 Hitachi, Ltd. Ladungsträgerstrahlgerät
DE69125229T2 (de) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Ladungspartikelstrahlanordnung
JP3148353B2 (ja) * 1991-05-30 2001-03-19 ケーエルエー・インストルメンツ・コーポレーション 電子ビーム検査方法とそのシステム
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP2969091B2 (ja) * 1997-01-20 1999-11-02 株式会社日立製作所 電子ビーム検査装置
JP2951609B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 電子ビーム検査装置
JP2951610B2 (ja) * 1997-01-20 1999-09-20 株式会社日立製作所 欠陥検査方法
EP2365511B1 (en) * 2010-03-10 2013-05-08 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Feedback loop for emitter flash cleaning

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
JPS53136614A (en) * 1977-05-04 1978-11-29 Matsushita Electric Ind Co Ltd Rotational speed regulator for motor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE438468A (he) * 1939-05-08
NL112758C (he) * 1942-10-28
NL102095C (he) * 1955-07-01
NL289910A (he) * 1962-03-08
US3174026A (en) * 1962-06-20 1965-03-16 Budd Co Method and means of circumventing cathode maintenance in electron beam devices
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) * 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
JPS53136614A (en) * 1977-05-04 1978-11-29 Matsushita Electric Ind Co Ltd Rotational speed regulator for motor

Also Published As

Publication number Publication date
DE2341377A1 (de) 1974-03-07
JPS49132975A (he) 1974-12-20
FR2214962B1 (he) 1978-07-07
JPS557661B2 (he) 1980-02-27
DE2366144C2 (de) 1982-12-30
FR2199613B1 (he) 1977-02-25
CA1031080A (en) 1978-05-09
FR2214962A1 (he) 1974-08-19
JPS54161263A (en) 1979-12-20
GB1433944A (en) 1976-04-28
GB1433945A (en) 1976-04-28
NL7908479A (nl) 1980-03-31
NL7311344A (he) 1974-02-19
US3809899A (en) 1974-05-07
FR2199613A1 (he) 1974-04-12

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