JPS5661123A - Diffusion of boron - Google Patents

Diffusion of boron

Info

Publication number
JPS5661123A
JPS5661123A JP13642879A JP13642879A JPS5661123A JP S5661123 A JPS5661123 A JP S5661123A JP 13642879 A JP13642879 A JP 13642879A JP 13642879 A JP13642879 A JP 13642879A JP S5661123 A JPS5661123 A JP S5661123A
Authority
JP
Japan
Prior art keywords
diffusion
diffusing
disk
diffusing source
diffused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13642879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5741081B2 (enExample
Inventor
Kimihiro Muraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Electric Manufacturing Ltd filed Critical Toyo Electric Manufacturing Ltd
Priority to JP13642879A priority Critical patent/JPS5661123A/ja
Publication of JPS5661123A publication Critical patent/JPS5661123A/ja
Publication of JPS5741081B2 publication Critical patent/JPS5741081B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/12—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
    • H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
    • H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
    • H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP13642879A 1979-10-24 1979-10-24 Diffusion of boron Granted JPS5661123A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13642879A JPS5661123A (en) 1979-10-24 1979-10-24 Diffusion of boron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13642879A JPS5661123A (en) 1979-10-24 1979-10-24 Diffusion of boron

Publications (2)

Publication Number Publication Date
JPS5661123A true JPS5661123A (en) 1981-05-26
JPS5741081B2 JPS5741081B2 (enExample) 1982-09-01

Family

ID=15174908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13642879A Granted JPS5661123A (en) 1979-10-24 1979-10-24 Diffusion of boron

Country Status (1)

Country Link
JP (1) JPS5661123A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142632A (en) * 1980-04-07 1981-11-07 Toyo Electric Mfg Co Ltd Diffusing method for boron

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021265U (enExample) * 1988-12-07 1990-01-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142632A (en) * 1980-04-07 1981-11-07 Toyo Electric Mfg Co Ltd Diffusing method for boron

Also Published As

Publication number Publication date
JPS5741081B2 (enExample) 1982-09-01

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