JPS55124277A - Semiconductor photodetector - Google Patents
Semiconductor photodetectorInfo
- Publication number
- JPS55124277A JPS55124277A JP3196879A JP3196879A JPS55124277A JP S55124277 A JPS55124277 A JP S55124277A JP 3196879 A JP3196879 A JP 3196879A JP 3196879 A JP3196879 A JP 3196879A JP S55124277 A JPS55124277 A JP S55124277A
- Authority
- JP
- Japan
- Prior art keywords
- region
- layer
- type
- sio212
- operates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000004642 Polyimide Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
- H01L31/02164—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors for shielding light, e.g. light blocking layers, cold shields for infrared detectors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To form photodetecting sensitivity of a semiconductor photodetector in high gradient by forming a light shielding layer on the surface region except other conducting region formed on the surface region of one conducting type. CONSTITUTION:SiO212 is diffused in a semiconductor substrate 16 having an n<->-type region 11 in selective diffusion to form a p<+>-type region 13, an insulating film layer (such as, for example, polyimide) 14 is formed on the SiO212 excluding the region 13, and a metal layer (such as, for example, aluminum) 15 is formed to shield light on the film 14. The layer 15 operates also as an anode. The layer 14 operates to reduce the MOS capacity formed with the layer 15 and the region 11.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3196879A JPS55124277A (en) | 1979-03-19 | 1979-03-19 | Semiconductor photodetector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3196879A JPS55124277A (en) | 1979-03-19 | 1979-03-19 | Semiconductor photodetector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55124277A true JPS55124277A (en) | 1980-09-25 |
Family
ID=12345744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3196879A Pending JPS55124277A (en) | 1979-03-19 | 1979-03-19 | Semiconductor photodetector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55124277A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61174680A (en) * | 1985-01-30 | 1986-08-06 | Hitachi Ltd | Semiconductor photodetector |
US5329149A (en) * | 1990-10-12 | 1994-07-12 | Seiko Instruments Inc. | Image sensor with non-light-transmissive layer having photosensing windows |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5110075A (en) * | 1975-06-06 | 1976-01-27 | Chokichi Iizuka | Dojokairyozai oyobi sonoseizohoho |
JPS5165660A (en) * | 1974-12-03 | 1976-06-07 | Fujitsu Ltd |
-
1979
- 1979-03-19 JP JP3196879A patent/JPS55124277A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5165660A (en) * | 1974-12-03 | 1976-06-07 | Fujitsu Ltd | |
JPS5110075A (en) * | 1975-06-06 | 1976-01-27 | Chokichi Iizuka | Dojokairyozai oyobi sonoseizohoho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61174680A (en) * | 1985-01-30 | 1986-08-06 | Hitachi Ltd | Semiconductor photodetector |
US5329149A (en) * | 1990-10-12 | 1994-07-12 | Seiko Instruments Inc. | Image sensor with non-light-transmissive layer having photosensing windows |
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