JPS5658284A - Detector for light employing semiconductor - Google Patents
Detector for light employing semiconductorInfo
- Publication number
- JPS5658284A JPS5658284A JP13407579A JP13407579A JPS5658284A JP S5658284 A JPS5658284 A JP S5658284A JP 13407579 A JP13407579 A JP 13407579A JP 13407579 A JP13407579 A JP 13407579A JP S5658284 A JPS5658284 A JP S5658284A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gold
- sensors
- diffusion
- carriers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 6
- 239000000758 substrate Substances 0.000 abstract 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 5
- 239000010931 gold Substances 0.000 abstract 5
- 229910052737 gold Inorganic materials 0.000 abstract 5
- 239000000969 carrier Substances 0.000 abstract 3
- 230000004304 visual acuity Effects 0.000 abstract 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To shorten the diffusion distances of carriers and improve spatial resolving power by a method wherein gold is selectively diffused into a semiconductor substrate. CONSTITUTION:A plurality of P type photosensors 13-15 are formed in such a manner that conductive P type diffusion regions 13-15 opposite to a semiconductor substrate 11 are made up into the substrate 11 containing N type impurities through an oxide film 12. Gold diffusion regions 16, 17 are built up by selectively diffusing gold into the substrate 11 between the sensors 13 and 14 and the sensors 14 and 15. Consequently, when an incident light is irradiated onto one photosensor, carriers are generated in the substrate 11, migrate in the substrate 11 by thermal diffusion, but recombine by the regions 16, 17, and do not reach to separated sensors. Thus, the spatial resolving power of a device is improved because the generation of signal currents due to the carriers collected to the sensors is decreased when the structure with the gold diffusion regions is compared to the conventional structure withno gold diffusion region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13407579A JPS5658284A (en) | 1979-10-16 | 1979-10-16 | Detector for light employing semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13407579A JPS5658284A (en) | 1979-10-16 | 1979-10-16 | Detector for light employing semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5658284A true JPS5658284A (en) | 1981-05-21 |
Family
ID=15119799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13407579A Pending JPS5658284A (en) | 1979-10-16 | 1979-10-16 | Detector for light employing semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5658284A (en) |
-
1979
- 1979-10-16 JP JP13407579A patent/JPS5658284A/en active Pending
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