FR2288793A1 - Procede de revetement sous vide - Google Patents

Procede de revetement sous vide

Info

Publication number
FR2288793A1
FR2288793A1 FR7518101A FR7518101A FR2288793A1 FR 2288793 A1 FR2288793 A1 FR 2288793A1 FR 7518101 A FR7518101 A FR 7518101A FR 7518101 A FR7518101 A FR 7518101A FR 2288793 A1 FR2288793 A1 FR 2288793A1
Authority
FR
France
Prior art keywords
substrates
electron beam
glass
heat
vapour deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7518101A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airco Inc
Original Assignee
Airco Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Airco Inc filed Critical Airco Inc
Publication of FR2288793A1 publication Critical patent/FR2288793A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
FR7518101A 1974-06-19 1975-06-10 Procede de revetement sous vide Withdrawn FR2288793A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48090974A 1974-06-19 1974-06-19

Publications (1)

Publication Number Publication Date
FR2288793A1 true FR2288793A1 (fr) 1976-05-21

Family

ID=23909852

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7518101A Withdrawn FR2288793A1 (fr) 1974-06-19 1975-06-10 Procede de revetement sous vide

Country Status (3)

Country Link
JP (1) JPS5114181A (fr)
DE (1) DE2513813A1 (fr)
FR (1) FR2288793A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104478A (en) * 1979-01-30 1980-08-09 Nippon Kogaku Kk <Nikon> Metallizing apparatus
JPS6096756A (ja) * 1983-10-27 1985-05-30 Mitsubishi Electric Corp 蒸着装置
JPH01108364A (ja) * 1987-10-19 1989-04-25 Ishikawajima Harima Heavy Ind Co Ltd 蒸発源の蒸着材料供給方法
EP1422313A1 (fr) * 2002-11-05 2004-05-26 Theva Dünnschichttechnik GmbH Dispositif et méthode de depot en phase vapeur sous vide d'un matériau de revêtement avec remplissage de matériau automatique
US7398605B2 (en) 2005-02-04 2008-07-15 Eastman Kodak Company Method of feeding particulate material to a heated vaporization surface
JP5568519B2 (ja) * 2011-06-23 2014-08-06 富士フイルム株式会社 成膜装置
CN105586570A (zh) * 2014-11-17 2016-05-18 上海和辉光电有限公司 辐射源蒸发系统及蒸镀控制方法

Also Published As

Publication number Publication date
DE2513813A1 (de) 1976-01-02
JPS5114181A (ja) 1976-02-04

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Legal Events

Date Code Title Description
ST Notification of lapse