JPS5741081B2 - - Google Patents
Info
- Publication number
- JPS5741081B2 JPS5741081B2 JP54136428A JP13642879A JPS5741081B2 JP S5741081 B2 JPS5741081 B2 JP S5741081B2 JP 54136428 A JP54136428 A JP 54136428A JP 13642879 A JP13642879 A JP 13642879A JP S5741081 B2 JPS5741081 B2 JP S5741081B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
- H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
- H10P32/12—Diffusion of dopants within, into or out of semiconductor bodies or layers between a solid phase and a gaseous phase
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P32/00—Diffusion of dopants within, into or out of wafers, substrates or parts of devices
- H10P32/10—Diffusion of dopants within, into or out of semiconductor bodies or layers
- H10P32/17—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material
- H10P32/171—Diffusion of dopants within, into or out of semiconductor bodies or layers characterised by the semiconductor material being group IV material
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13642879A JPS5661123A (en) | 1979-10-24 | 1979-10-24 | Diffusion of boron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13642879A JPS5661123A (en) | 1979-10-24 | 1979-10-24 | Diffusion of boron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5661123A JPS5661123A (en) | 1981-05-26 |
| JPS5741081B2 true JPS5741081B2 (enExample) | 1982-09-01 |
Family
ID=15174908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13642879A Granted JPS5661123A (en) | 1979-10-24 | 1979-10-24 | Diffusion of boron |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5661123A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH021265U (enExample) * | 1988-12-07 | 1990-01-08 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56142632A (en) * | 1980-04-07 | 1981-11-07 | Toyo Electric Mfg Co Ltd | Diffusing method for boron |
-
1979
- 1979-10-24 JP JP13642879A patent/JPS5661123A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH021265U (enExample) * | 1988-12-07 | 1990-01-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5661123A (en) | 1981-05-26 |