JPS565972A - Film forming method - Google Patents

Film forming method

Info

Publication number
JPS565972A
JPS565972A JP8209179A JP8209179A JPS565972A JP S565972 A JPS565972 A JP S565972A JP 8209179 A JP8209179 A JP 8209179A JP 8209179 A JP8209179 A JP 8209179A JP S565972 A JPS565972 A JP S565972A
Authority
JP
Japan
Prior art keywords
supporter
electrodes
film
wiry
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8209179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257710B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Inoue
Isamu Shimizu
Kyosuke Ogawa
Nobuo Kitajima
Tadaharu Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8209179A priority Critical patent/JPS565972A/ja
Publication of JPS565972A publication Critical patent/JPS565972A/ja
Publication of JPS6257710B2 publication Critical patent/JPS6257710B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP8209179A 1979-06-27 1979-06-27 Film forming method Granted JPS565972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8209179A JPS565972A (en) 1979-06-27 1979-06-27 Film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8209179A JPS565972A (en) 1979-06-27 1979-06-27 Film forming method

Publications (2)

Publication Number Publication Date
JPS565972A true JPS565972A (en) 1981-01-22
JPS6257710B2 JPS6257710B2 (enrdf_load_stackoverflow) 1987-12-02

Family

ID=13764759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8209179A Granted JPS565972A (en) 1979-06-27 1979-06-27 Film forming method

Country Status (1)

Country Link
JP (1) JPS565972A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935674A (ja) * 1982-08-24 1984-02-27 Sumitomo Electric Ind Ltd 蒸着装置
JPS6428810A (en) * 1987-07-23 1989-01-31 Mitsui Toatsu Chemicals Device for forming film
JPH04107826U (ja) * 1991-02-28 1992-09-17 三洋電機株式会社 光起電力素子の製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5935674A (ja) * 1982-08-24 1984-02-27 Sumitomo Electric Ind Ltd 蒸着装置
JPS6428810A (en) * 1987-07-23 1989-01-31 Mitsui Toatsu Chemicals Device for forming film
JPH04107826U (ja) * 1991-02-28 1992-09-17 三洋電機株式会社 光起電力素子の製造装置

Also Published As

Publication number Publication date
JPS6257710B2 (enrdf_load_stackoverflow) 1987-12-02

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