JPS5654070A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS5654070A JPS5654070A JP12920679A JP12920679A JPS5654070A JP S5654070 A JPS5654070 A JP S5654070A JP 12920679 A JP12920679 A JP 12920679A JP 12920679 A JP12920679 A JP 12920679A JP S5654070 A JPS5654070 A JP S5654070A
- Authority
- JP
- Japan
- Prior art keywords
- film
- gate
- drain region
- source
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000004083 survival effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12920679A JPS5654070A (en) | 1979-10-05 | 1979-10-05 | Method of manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12920679A JPS5654070A (en) | 1979-10-05 | 1979-10-05 | Method of manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5654070A true JPS5654070A (en) | 1981-05-13 |
Family
ID=15003752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12920679A Pending JPS5654070A (en) | 1979-10-05 | 1979-10-05 | Method of manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5654070A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63212433A (ja) * | 1987-02-27 | 1988-09-05 | Miyano:Kk | 加工機械における加工物供給搬出装置 |
JPS63212434A (ja) * | 1987-02-27 | 1988-09-05 | Miyano:Kk | 加工機械における加工物搬送装置 |
US5637411A (en) * | 1991-07-29 | 1997-06-10 | Hitachi Maxell, Ltd. | Magneto-optical recording medium and process for producing the same |
-
1979
- 1979-10-05 JP JP12920679A patent/JPS5654070A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63212433A (ja) * | 1987-02-27 | 1988-09-05 | Miyano:Kk | 加工機械における加工物供給搬出装置 |
JPS63212434A (ja) * | 1987-02-27 | 1988-09-05 | Miyano:Kk | 加工機械における加工物搬送装置 |
US5637411A (en) * | 1991-07-29 | 1997-06-10 | Hitachi Maxell, Ltd. | Magneto-optical recording medium and process for producing the same |
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