JPS565339A - Manufacture of high purity quartz glass - Google Patents

Manufacture of high purity quartz glass

Info

Publication number
JPS565339A
JPS565339A JP8113979A JP8113979A JPS565339A JP S565339 A JPS565339 A JP S565339A JP 8113979 A JP8113979 A JP 8113979A JP 8113979 A JP8113979 A JP 8113979A JP S565339 A JPS565339 A JP S565339A
Authority
JP
Japan
Prior art keywords
quartz glass
oxygen gas
groups
raw material
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8113979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723652B2 (https=
Inventor
Takao Edahiro
Gotaro Tanaka
Toru Kuwabara
Masaaki Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Sumitomo Electric Industries Ltd filed Critical Nippon Telegraph and Telephone Corp
Priority to JP8113979A priority Critical patent/JPS565339A/ja
Priority to GB8020803A priority patent/GB2054553B/en
Publication of JPS565339A publication Critical patent/JPS565339A/ja
Priority to US06/344,583 priority patent/US4406680A/en
Publication of JPS5723652B2 publication Critical patent/JPS5723652B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Compositions (AREA)
JP8113979A 1979-06-26 1979-06-26 Manufacture of high purity quartz glass Granted JPS565339A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP8113979A JPS565339A (en) 1979-06-26 1979-06-26 Manufacture of high purity quartz glass
GB8020803A GB2054553B (en) 1979-06-26 1980-06-25 Process for producing high-purity silica glass with reduced oh-content
US06/344,583 US4406680A (en) 1979-06-26 1982-02-01 Process for producing high-purity silica glass

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8113979A JPS565339A (en) 1979-06-26 1979-06-26 Manufacture of high purity quartz glass

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3150683A Division JPS58161937A (ja) 1983-02-25 1983-02-25 高純度石英ガラスの製造方法

Publications (2)

Publication Number Publication Date
JPS565339A true JPS565339A (en) 1981-01-20
JPS5723652B2 JPS5723652B2 (https=) 1982-05-19

Family

ID=13738061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8113979A Granted JPS565339A (en) 1979-06-26 1979-06-26 Manufacture of high purity quartz glass

Country Status (3)

Country Link
US (1) US4406680A (https=)
JP (1) JPS565339A (https=)
GB (1) GB2054553B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992927A (ja) * 1982-11-15 1984-05-29 Shin Etsu Chem Co Ltd 集束型光フアイバ−母材の製造方法
JPH02124737A (ja) * 1988-11-04 1990-05-14 Shin Etsu Chem Co Ltd 高ｎａステップインデックス型光ファイバー母材の製造方法

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4474593A (en) * 1982-04-26 1984-10-02 At&T Technologies Inc. Method of fabricating a lightguide fiber
JPS59232934A (ja) * 1983-06-17 1984-12-27 Sumitomo Electric Ind Ltd 光フアイバ母材の製造方法
JPS6046941A (ja) * 1983-08-25 1985-03-14 Sumitomo Electric Ind Ltd 光フアイバ−用プリフオ−ムの製造方法
US4713105A (en) * 1984-01-24 1987-12-15 American Telephone And Telegraph Company, At&T Bell Laboratories Method for glass fiber splicing by flame fusion
JPS60200836A (ja) * 1984-03-27 1985-10-11 Sumitomo Electric Ind Ltd 光フアイバ−用プリフオ−ムの製造方法
US4604118A (en) * 1985-08-13 1986-08-05 Corning Glass Works Method for synthesizing MgO--Al2 O3 --SiO2 glasses and ceramics
JPS631275A (ja) * 1986-06-20 1988-01-06 Matsushita Electric Works Ltd モニタカメラ付きドアホン子器
US5203897A (en) * 1989-11-13 1993-04-20 Corning Incorporated Method for making a preform doped with a metal oxide
DE69032175T2 (de) * 1989-11-13 1998-07-09 Corning Inc Verfahren und Vorrichtung zum Herstellen einer Vorform mit einem dotierten Metalloxyd
JPH0611705A (ja) * 1992-01-31 1994-01-21 Sony Corp 能動素子基板
JP3007510B2 (ja) * 1993-04-27 2000-02-07 信越化学工業株式会社 合成石英ガラス部材の製造方法
DE19527451C2 (de) * 1995-07-27 1998-06-04 Heraeus Quarzglas Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeigneter Brenner
US6269663B1 (en) * 1998-03-05 2001-08-07 Alcatel Method of purifying silica and depositing on an optical fiber preform
EP1216967A1 (en) * 2000-12-19 2002-06-26 PIRELLI CAVI E SISTEMI S.p.A. Method for manufacturing a glass optical fibre preform by vapour deposition
US6910352B2 (en) * 2002-04-24 2005-06-28 Corning Incorporated Deposition of high fluorine content silica soot
EP1515919B1 (en) * 2002-05-03 2006-03-08 Prysmian Cavi e Sistemi Energia S.r.l. Burner assembly for producing glass preforms and corresponding production process
US7526160B1 (en) * 2007-12-20 2009-04-28 Baker Hughes Incorporated Optical fiber Bragg grating with improved hydrogen resistance
RU2381186C1 (ru) * 2008-12-18 2010-02-10 Иван Федорович Пивин Горелка
RU2391296C1 (ru) * 2008-12-18 2010-06-10 Иван Федорович Пивин Реактор
US8567214B2 (en) 2010-06-28 2013-10-29 Asahi Glass Company, Limited Method for producing glass body and method for producing optical member for EUV lithography

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3459522A (en) * 1963-07-08 1969-08-05 Corning Glass Works Method of treating a porous,high silica content glass
US4161505A (en) * 1972-11-25 1979-07-17 Sumitomo Electric Industries, Ltd. Process for producing optical transmission fiber
US3933454A (en) * 1974-04-22 1976-01-20 Corning Glass Works Method of making optical waveguides
JPS51102014A (en) * 1974-11-01 1976-09-09 Komatsu Denshi Kinzoku Kk Kojundotomeigarasutaino seizohoho
US4017288A (en) * 1975-12-15 1977-04-12 Bell Telephone Laboratories, Incorporated Method for making optical fibers with helical gradations in composition
JPS5927728B2 (ja) * 1977-08-11 1984-07-07 日本電信電話株式会社 煤状ガラスロッドの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5992927A (ja) * 1982-11-15 1984-05-29 Shin Etsu Chem Co Ltd 集束型光フアイバ−母材の製造方法
JPH02124737A (ja) * 1988-11-04 1990-05-14 Shin Etsu Chem Co Ltd 高ｎａステップインデックス型光ファイバー母材の製造方法

Also Published As

Publication number Publication date
US4406680A (en) 1983-09-27
GB2054553B (en) 1983-09-28
GB2054553A (en) 1981-02-18
JPS5723652B2 (https=) 1982-05-19

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