JPS5646404A - Measuring device of optical film thickness - Google Patents
Measuring device of optical film thicknessInfo
- Publication number
- JPS5646404A JPS5646404A JP12285779A JP12285779A JPS5646404A JP S5646404 A JPS5646404 A JP S5646404A JP 12285779 A JP12285779 A JP 12285779A JP 12285779 A JP12285779 A JP 12285779A JP S5646404 A JPS5646404 A JP S5646404A
- Authority
- JP
- Japan
- Prior art keywords
- light
- thin film
- reflected
- irradiating
- irradiating light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To ensure a high-accuracy measurement of the thickness of a thin film, by irradiating the monochrome irradiating light onto the thin film and then obtaining the variation of the volume of reflected light.
CONSTITUTION: The sample 1 is set into the vapor depositing device 6 so as to oppose to the vapor depositing source 3, and then the thin film 2 is formed on the surface of the sample 1. The irradiating light is reflected by the reflector 4 and then irradiated on the film 2 with an incident angle, and the reflected light from the film 2 is reflected by the reflector 9 to enter the photodetector 7 after transmitted through the band-pass filter 8. The light source 5 uses the laser beam and then irradiates the irradiating light during the formation of the thin film and with a constant intensity kept. Thus the optical thickness of the thin film under formation is decided from the relative variation of the intensity of reflected light which is measured in the form of the output variation of the photodetector. The filter 8 provided in front of the element 7 transmits through only the wavelength of the irradiating light to eliminate the error of measurement due to the radiation from the source 3, the indoor light and the like. The irradiating light selects the transmissible monochrome light according to the optical characteristics of the material of deposit.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12285779A JPS5646404A (en) | 1979-09-25 | 1979-09-25 | Measuring device of optical film thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12285779A JPS5646404A (en) | 1979-09-25 | 1979-09-25 | Measuring device of optical film thickness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5646404A true JPS5646404A (en) | 1981-04-27 |
Family
ID=14846352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12285779A Pending JPS5646404A (en) | 1979-09-25 | 1979-09-25 | Measuring device of optical film thickness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5646404A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63179852U (en) * | 1987-05-14 | 1988-11-21 | ||
JPH025006U (en) * | 1988-06-23 | 1990-01-12 |
-
1979
- 1979-09-25 JP JP12285779A patent/JPS5646404A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63179852U (en) * | 1987-05-14 | 1988-11-21 | ||
JPH0513242Y2 (en) * | 1987-05-14 | 1993-04-07 | ||
JPH025006U (en) * | 1988-06-23 | 1990-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5694229A (en) | Measuring device for internal temperature of material to be examined | |
JPS5646404A (en) | Measuring device of optical film thickness | |
JPS56115905A (en) | Measuring method for thickness of transparent film and device therefor | |
JPS57101709A (en) | Film thickness gauge with infrared ray | |
JPS55142220A (en) | Device for measuring wavelength | |
JPS5483853A (en) | Measuring device | |
JPS5752807A (en) | Device for measuring film thickness | |
JPS5767815A (en) | Measuring method for position of reflector using light | |
JPS5720603A (en) | Detector for plate width using laser | |
JPS55140102A (en) | Measuring device for flatness of inspected plane glass | |
JPS5582068A (en) | Measuring unit for water depth using laser | |
JPS56120904A (en) | Measuring method for rate of removal of coating film | |
JPS57108704A (en) | Measuring method of thickness of film coated on metallic plate | |
JPS55115001A (en) | Aiming mirror plate | |
JPS56130606A (en) | Optical measuring device for thickness of transparent material | |
JPS53107865A (en) | Detector of minute undulations | |
JPS5782723A (en) | Measuring device for oscillation | |
JPS57182604A (en) | Interference measuring device | |
JPS60202940A (en) | Method of measuring depth of etching | |
JPS5712343A (en) | Measuring instrument for eccentricity of lens | |
JPS5790144A (en) | Infrared spectro-analyzing method | |
SU117059A1 (en) | A method for determining the refractive index of solids and liquids and a refractometer for implementing this method | |
EP0115902A3 (en) | Spectrophotometer | |
SU594928A1 (en) | Method of registering structural changes in optically permeable objects | |
JPS57175202A (en) | Indirect measuring method for surface distortion caused by laser |