JPS5646404A - Measuring device of optical film thickness - Google Patents

Measuring device of optical film thickness

Info

Publication number
JPS5646404A
JPS5646404A JP12285779A JP12285779A JPS5646404A JP S5646404 A JPS5646404 A JP S5646404A JP 12285779 A JP12285779 A JP 12285779A JP 12285779 A JP12285779 A JP 12285779A JP S5646404 A JPS5646404 A JP S5646404A
Authority
JP
Japan
Prior art keywords
light
thin film
reflected
irradiating
irradiating light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12285779A
Other languages
Japanese (ja)
Inventor
Kenji Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12285779A priority Critical patent/JPS5646404A/en
Publication of JPS5646404A publication Critical patent/JPS5646404A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To ensure a high-accuracy measurement of the thickness of a thin film, by irradiating the monochrome irradiating light onto the thin film and then obtaining the variation of the volume of reflected light.
CONSTITUTION: The sample 1 is set into the vapor depositing device 6 so as to oppose to the vapor depositing source 3, and then the thin film 2 is formed on the surface of the sample 1. The irradiating light is reflected by the reflector 4 and then irradiated on the film 2 with an incident angle, and the reflected light from the film 2 is reflected by the reflector 9 to enter the photodetector 7 after transmitted through the band-pass filter 8. The light source 5 uses the laser beam and then irradiates the irradiating light during the formation of the thin film and with a constant intensity kept. Thus the optical thickness of the thin film under formation is decided from the relative variation of the intensity of reflected light which is measured in the form of the output variation of the photodetector. The filter 8 provided in front of the element 7 transmits through only the wavelength of the irradiating light to eliminate the error of measurement due to the radiation from the source 3, the indoor light and the like. The irradiating light selects the transmissible monochrome light according to the optical characteristics of the material of deposit.
COPYRIGHT: (C)1981,JPO&Japio
JP12285779A 1979-09-25 1979-09-25 Measuring device of optical film thickness Pending JPS5646404A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12285779A JPS5646404A (en) 1979-09-25 1979-09-25 Measuring device of optical film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12285779A JPS5646404A (en) 1979-09-25 1979-09-25 Measuring device of optical film thickness

Publications (1)

Publication Number Publication Date
JPS5646404A true JPS5646404A (en) 1981-04-27

Family

ID=14846352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12285779A Pending JPS5646404A (en) 1979-09-25 1979-09-25 Measuring device of optical film thickness

Country Status (1)

Country Link
JP (1) JPS5646404A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179852U (en) * 1987-05-14 1988-11-21
JPH025006U (en) * 1988-06-23 1990-01-12

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63179852U (en) * 1987-05-14 1988-11-21
JPH0513242Y2 (en) * 1987-05-14 1993-04-07
JPH025006U (en) * 1988-06-23 1990-01-12

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