JPS5643634A - Negative type resist material - Google Patents

Negative type resist material

Info

Publication number
JPS5643634A
JPS5643634A JP11871279A JP11871279A JPS5643634A JP S5643634 A JPS5643634 A JP S5643634A JP 11871279 A JP11871279 A JP 11871279A JP 11871279 A JP11871279 A JP 11871279A JP S5643634 A JPS5643634 A JP S5643634A
Authority
JP
Japan
Prior art keywords
copolymer
resist material
resolution
average mol
soluble
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11871279A
Other languages
English (en)
Other versions
JPS6058462B2 (ja
Inventor
Yasuhiro Yoneda
Tateo Kitamura
Jiro Naito
Toshisuke Kitakoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11871279A priority Critical patent/JPS6058462B2/ja
Publication of JPS5643634A publication Critical patent/JPS5643634A/ja
Publication of JPS6058462B2 publication Critical patent/JPS6058462B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP11871279A 1979-09-18 1979-09-18 ネガ型レジスト材料 Expired JPS6058462B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11871279A JPS6058462B2 (ja) 1979-09-18 1979-09-18 ネガ型レジスト材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11871279A JPS6058462B2 (ja) 1979-09-18 1979-09-18 ネガ型レジスト材料

Publications (2)

Publication Number Publication Date
JPS5643634A true JPS5643634A (en) 1981-04-22
JPS6058462B2 JPS6058462B2 (ja) 1985-12-20

Family

ID=14743236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11871279A Expired JPS6058462B2 (ja) 1979-09-18 1979-09-18 ネガ型レジスト材料

Country Status (1)

Country Link
JP (1) JPS6058462B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169120A (ja) * 1984-09-12 1986-04-09 Nec Corp 液相成長用ボ−ト
JPH03281513A (ja) * 1990-03-29 1991-12-12 Nippon Kasei Chem Co Ltd 液状組成物
WO2018037912A1 (ja) * 2016-08-22 2018-03-01 株式会社大阪ソーダ 光硬化性樹脂組成物、インキ及び塗料

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169120A (ja) * 1984-09-12 1986-04-09 Nec Corp 液相成長用ボ−ト
JPH03281513A (ja) * 1990-03-29 1991-12-12 Nippon Kasei Chem Co Ltd 液状組成物
WO2018037912A1 (ja) * 2016-08-22 2018-03-01 株式会社大阪ソーダ 光硬化性樹脂組成物、インキ及び塗料
CN109641985A (zh) * 2016-08-22 2019-04-16 株式会社大阪曹达 光固化性树脂组合物、油墨及涂料
US11149157B2 (en) 2016-08-22 2021-10-19 Osaka Soda Co., Ltd. Photocurable resin composition, ink and coating material
CN109641985B (zh) * 2016-08-22 2022-04-22 株式会社大阪曹达 光固化性树脂组合物、油墨及涂料

Also Published As

Publication number Publication date
JPS6058462B2 (ja) 1985-12-20

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