JPS5641663A - Focusing method and its device for scanning electron microscope and the like - Google Patents

Focusing method and its device for scanning electron microscope and the like

Info

Publication number
JPS5641663A
JPS5641663A JP11692579A JP11692579A JPS5641663A JP S5641663 A JPS5641663 A JP S5641663A JP 11692579 A JP11692579 A JP 11692579A JP 11692579 A JP11692579 A JP 11692579A JP S5641663 A JPS5641663 A JP S5641663A
Authority
JP
Japan
Prior art keywords
focus position
selector
focusing
position searching
latch memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11692579A
Other languages
Japanese (ja)
Inventor
Masahiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP11692579A priority Critical patent/JPS5641663A/en
Publication of JPS5641663A publication Critical patent/JPS5641663A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To promptly perform a focusing operation while maintaining accuracy by detecting the right focus position in which the first focus position searching is conducted with a prescribed step width, the second focus position searching is conducted based on the first search information, and same operations are repeated successively. CONSTITUTION:Signals from a maximum value detecting circuit 9 are output to a latch memory group 10 constituting a starting position determing means SD. The latch memory group 10 is constituted with three memories, and the memories maximize conversion signals to be detected on the first focus position searching. Step addresses are memorized for a next focus position searching. An input side of each latch memory is connected to a counter 11, an output is to one input terminal of each selector of a selector group 12, and the counter 11 is connected to another input terminal of each selector. Thus a prompt focusing is carried out while maintaining the accuracy for focusing.
JP11692579A 1979-09-12 1979-09-12 Focusing method and its device for scanning electron microscope and the like Pending JPS5641663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11692579A JPS5641663A (en) 1979-09-12 1979-09-12 Focusing method and its device for scanning electron microscope and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11692579A JPS5641663A (en) 1979-09-12 1979-09-12 Focusing method and its device for scanning electron microscope and the like

Publications (1)

Publication Number Publication Date
JPS5641663A true JPS5641663A (en) 1981-04-18

Family

ID=14699067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11692579A Pending JPS5641663A (en) 1979-09-12 1979-09-12 Focusing method and its device for scanning electron microscope and the like

Country Status (1)

Country Link
JP (1) JPS5641663A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054152A (en) * 1983-09-02 1985-03-28 Hitachi Ltd Method of automatically controlling focus in electron ray device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054152A (en) * 1983-09-02 1985-03-28 Hitachi Ltd Method of automatically controlling focus in electron ray device

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