JPS5518031A - Stage shifting device in electron beam device - Google Patents

Stage shifting device in electron beam device

Info

Publication number
JPS5518031A
JPS5518031A JP9074478A JP9074478A JPS5518031A JP S5518031 A JPS5518031 A JP S5518031A JP 9074478 A JP9074478 A JP 9074478A JP 9074478 A JP9074478 A JP 9074478A JP S5518031 A JPS5518031 A JP S5518031A
Authority
JP
Japan
Prior art keywords
flop
stage
flip
difference
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9074478A
Other languages
Japanese (ja)
Inventor
Mitsushiro Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9074478A priority Critical patent/JPS5518031A/en
Publication of JPS5518031A publication Critical patent/JPS5518031A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Control Of Stepping Motors (AREA)

Abstract

PURPOSE:To carry out the shift of the stage by use of a D/A converter of a low bit number thereby to reduce the manufacturing cost of the device. CONSTITUTION:A target value is stored in a register 9, and a filip-flop 14 is set through an OR circuit 20. Said target value being compared 12 with the stored value(present position of the stage) of the counter to open an AND gate 15a and to supply a pulse to a motor 8. The rise-up of the output of the flip-flop 14 is detected 17, and a bedplate 6 moves as the beam deflects 5 in a specific quantity 21. When the content of a counter 11 coincides with the stored value of the register, the flip- flop 14 is reset and the gate 15a is closed and stopped. The output of the flip-flop 14 is detected 19 and a difference 13 is examined and a corresponding signal is selected 17 from a constant circuit 21 and deflected 5 therefrom. In this manner, the bedplate 6 is stopped and the difference between the quantity of shift up to the present and the target quantity is discriminated. When the difference is greater than a predetermined value, retransfer of the stage is carried out, and hence the D/A converter 18 for the output of the constant circuit 21 may be sufficient even if the number of bits is small, and the cost for manufacturing the device is greatly reduced.
JP9074478A 1978-07-25 1978-07-25 Stage shifting device in electron beam device Pending JPS5518031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9074478A JPS5518031A (en) 1978-07-25 1978-07-25 Stage shifting device in electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9074478A JPS5518031A (en) 1978-07-25 1978-07-25 Stage shifting device in electron beam device

Publications (1)

Publication Number Publication Date
JPS5518031A true JPS5518031A (en) 1980-02-07

Family

ID=14007087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9074478A Pending JPS5518031A (en) 1978-07-25 1978-07-25 Stage shifting device in electron beam device

Country Status (1)

Country Link
JP (1) JPS5518031A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130631U (en) * 1984-02-13 1985-09-02 日本電子株式会社 Charged particle beam drawing device
USRE37832E1 (en) 1995-09-04 2002-09-10 Makita Corporation Electromotive chain saw
DE3530685C5 (en) * 1985-08-28 2005-07-21 Fa. Andreas Stihl Electric motor chainsaw
DE202013100218U1 (en) 2012-01-16 2013-03-13 Hitachi Koki Co., Ltd. chainsaw

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054782A (en) * 1973-09-10 1975-05-14
JPS53110381A (en) * 1977-03-08 1978-09-27 Nippon Telegr & Teleph Corp <Ntt> Position control device for electron beam exposure unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054782A (en) * 1973-09-10 1975-05-14
JPS53110381A (en) * 1977-03-08 1978-09-27 Nippon Telegr & Teleph Corp <Ntt> Position control device for electron beam exposure unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130631U (en) * 1984-02-13 1985-09-02 日本電子株式会社 Charged particle beam drawing device
DE3530685C5 (en) * 1985-08-28 2005-07-21 Fa. Andreas Stihl Electric motor chainsaw
USRE37832E1 (en) 1995-09-04 2002-09-10 Makita Corporation Electromotive chain saw
DE202013100218U1 (en) 2012-01-16 2013-03-13 Hitachi Koki Co., Ltd. chainsaw

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