JPS53110381A - Position control device for electron beam exposure unit - Google Patents

Position control device for electron beam exposure unit

Info

Publication number
JPS53110381A
JPS53110381A JP2506077A JP2506077A JPS53110381A JP S53110381 A JPS53110381 A JP S53110381A JP 2506077 A JP2506077 A JP 2506077A JP 2506077 A JP2506077 A JP 2506077A JP S53110381 A JPS53110381 A JP S53110381A
Authority
JP
Japan
Prior art keywords
electron beam
control device
position control
exposure unit
beam exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2506077A
Other languages
Japanese (ja)
Inventor
Kiichi Takamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP2506077A priority Critical patent/JPS53110381A/en
Publication of JPS53110381A publication Critical patent/JPS53110381A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To simplify the constitution of the electric circuit group and to ensure a highspeed correction, by providing the position measurement devices to control the driving motor of the mount board and to correct the projection position of the electron beam respectively.
COPYRIGHT: (C)1978,JPO&Japio
JP2506077A 1977-03-08 1977-03-08 Position control device for electron beam exposure unit Pending JPS53110381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2506077A JPS53110381A (en) 1977-03-08 1977-03-08 Position control device for electron beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2506077A JPS53110381A (en) 1977-03-08 1977-03-08 Position control device for electron beam exposure unit

Publications (1)

Publication Number Publication Date
JPS53110381A true JPS53110381A (en) 1978-09-27

Family

ID=12155371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2506077A Pending JPS53110381A (en) 1977-03-08 1977-03-08 Position control device for electron beam exposure unit

Country Status (1)

Country Link
JP (1) JPS53110381A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518031A (en) * 1978-07-25 1980-02-07 Jeol Ltd Stage shifting device in electron beam device
JPS55117237A (en) * 1979-03-02 1980-09-09 Hitachi Ltd Device for drawing image by electron beam

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054782A (en) * 1973-09-10 1975-05-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054782A (en) * 1973-09-10 1975-05-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5518031A (en) * 1978-07-25 1980-02-07 Jeol Ltd Stage shifting device in electron beam device
JPS55117237A (en) * 1979-03-02 1980-09-09 Hitachi Ltd Device for drawing image by electron beam

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