JPS53110381A - Position control device for electron beam exposure unit - Google Patents
Position control device for electron beam exposure unitInfo
- Publication number
- JPS53110381A JPS53110381A JP2506077A JP2506077A JPS53110381A JP S53110381 A JPS53110381 A JP S53110381A JP 2506077 A JP2506077 A JP 2506077A JP 2506077 A JP2506077 A JP 2506077A JP S53110381 A JPS53110381 A JP S53110381A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- control device
- position control
- exposure unit
- beam exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To simplify the constitution of the electric circuit group and to ensure a highspeed correction, by providing the position measurement devices to control the driving motor of the mount board and to correct the projection position of the electron beam respectively.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2506077A JPS53110381A (en) | 1977-03-08 | 1977-03-08 | Position control device for electron beam exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2506077A JPS53110381A (en) | 1977-03-08 | 1977-03-08 | Position control device for electron beam exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53110381A true JPS53110381A (en) | 1978-09-27 |
Family
ID=12155371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2506077A Pending JPS53110381A (en) | 1977-03-08 | 1977-03-08 | Position control device for electron beam exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53110381A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518031A (en) * | 1978-07-25 | 1980-02-07 | Jeol Ltd | Stage shifting device in electron beam device |
JPS55117237A (en) * | 1979-03-02 | 1980-09-09 | Hitachi Ltd | Device for drawing image by electron beam |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5054782A (en) * | 1973-09-10 | 1975-05-14 |
-
1977
- 1977-03-08 JP JP2506077A patent/JPS53110381A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5054782A (en) * | 1973-09-10 | 1975-05-14 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5518031A (en) * | 1978-07-25 | 1980-02-07 | Jeol Ltd | Stage shifting device in electron beam device |
JPS55117237A (en) * | 1979-03-02 | 1980-09-09 | Hitachi Ltd | Device for drawing image by electron beam |
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