JPS5372466A - Exposing unit for electron - Google Patents
Exposing unit for electronInfo
- Publication number
- JPS5372466A JPS5372466A JP14763276A JP14763276A JPS5372466A JP S5372466 A JPS5372466 A JP S5372466A JP 14763276 A JP14763276 A JP 14763276A JP 14763276 A JP14763276 A JP 14763276A JP S5372466 A JPS5372466 A JP S5372466A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- exposing unit
- revolution
- compensating
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To simplify the electric circuit and to reduce the compensating time, by compensating the component of revolution for the error between the direction of deflection of beam and the mark position with a slight revolution of test piece.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51147632A JPS5933970B2 (en) | 1976-12-10 | 1976-12-10 | Electron beam exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51147632A JPS5933970B2 (en) | 1976-12-10 | 1976-12-10 | Electron beam exposure equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5372466A true JPS5372466A (en) | 1978-06-27 |
JPS5933970B2 JPS5933970B2 (en) | 1984-08-20 |
Family
ID=15434710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51147632A Expired JPS5933970B2 (en) | 1976-12-10 | 1976-12-10 | Electron beam exposure equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5933970B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158924A (en) * | 1982-03-16 | 1983-09-21 | Seiko Epson Corp | Exposure device |
-
1976
- 1976-12-10 JP JP51147632A patent/JPS5933970B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58158924A (en) * | 1982-03-16 | 1983-09-21 | Seiko Epson Corp | Exposure device |
Also Published As
Publication number | Publication date |
---|---|
JPS5933970B2 (en) | 1984-08-20 |
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