JPS563958A - Fan type electrode device - Google Patents

Fan type electrode device

Info

Publication number
JPS563958A
JPS563958A JP7816279A JP7816279A JPS563958A JP S563958 A JPS563958 A JP S563958A JP 7816279 A JP7816279 A JP 7816279A JP 7816279 A JP7816279 A JP 7816279A JP S563958 A JPS563958 A JP S563958A
Authority
JP
Japan
Prior art keywords
fan type
frame metal
cylindrical plate
type electrodes
electrode device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7816279A
Other languages
Japanese (ja)
Inventor
Toshimichi Taya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7816279A priority Critical patent/JPS563958A/en
Publication of JPS563958A publication Critical patent/JPS563958A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/22—Electrostatic deflection

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To reduce the volume of vacuum portion and miniaturize a fan type electrode device by integrally providing a nonmagnetic frame metal with paths for charged particles between paired fan type electrodes of a coaxial and cylindrical plate form. CONSTITUTION:The external and internal fan type electrodes 4a and 4b, having a coaxial and cylindrical plate form, are clamped with the nonmagnetic frame metal 15 through the insulating packings 11a and 11b by means of the bolt 13. The frame metal 13 is provided with the inlet and outlet flanges 16a and 16b with the window 18 leading to the space 20 formed in the cylindrical plate in the middle of the frame metal. Thus, by integrally combining the fan type electrodes 4a and 4b with the frame metal 15, an ion beam path consisting of the window 18 and the space 20 is sealed up and hence a vacuum condition is easily produced, so that the volume of the vacuum portion can be reduced and the device can therefore be wholly miniaturized.
JP7816279A 1979-06-22 1979-06-22 Fan type electrode device Pending JPS563958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7816279A JPS563958A (en) 1979-06-22 1979-06-22 Fan type electrode device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7816279A JPS563958A (en) 1979-06-22 1979-06-22 Fan type electrode device

Publications (1)

Publication Number Publication Date
JPS563958A true JPS563958A (en) 1981-01-16

Family

ID=13654224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7816279A Pending JPS563958A (en) 1979-06-22 1979-06-22 Fan type electrode device

Country Status (1)

Country Link
JP (1) JPS563958A (en)

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